V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Vacuum System Peripherals:

w q Nil None With vacuum switch t r e w q Number of ejector/valve stations E Alignment (for special specifications) U side D side 13-14-40 40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VM

0 e !5 w !3 EA EA y A A P P r q B EB B EB !4 !7 !1 !2 t Componet Parts Aluminum alloy NBR Notes No. !1 !0 Description Material PBT ADC Material Notes No. q Description Piston guide B Valve Metallic plated Only external pilot style: ZDC Black zinc chromated Pilot body Body w e Stainless steel Return spring ZDC Head cover r Stainless steel Spool sleeve !2 !3 !4 Rubber Cushion !

V

A P P L I C A B L E T U B E MORE DIMENSIONS S E E N E X T P A G E Applicable Tube OD P Q R S H O W T O O R D E R S E E N E X T P A G E 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 Courtesy of Steven Engineering, Inc. !

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve Series VQ100 1

20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21,

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

Table of Contents

w e r t y No. q w e r t y u i o !

KJ

w e r t y No. q w e r t y u i o !

A

I L S C R A P E R X C 3 5 O P T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S

Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Stopper Cylinder

0 w q e r t u !

MGP

Note 6) Dimension E' cannot be less than the standard dimension E.

MHZ

1 e !9 w @0 @1 !4 MHZ MHF MHL i !7 !6 !5 !0 o q u !2 r t y !3 Single acting/Normally closed MHR !8 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Misc. Component Parts DNo. Description Material Note No. Description Note Material Steel balls Hard anodized Aluminum alloy High carbon chrome bearing steel q !

MHZ

For details, refer to Pneumatic Clean Series catalog. 12-2-29 29 Series MHZ2 Construction: MHZ2-6 Double acting/With fingers open Single acting/Normally open e !0 @1 @4 o !2 w i !4 !6 !1 !7 !8 !9 u q @3 @2 !3 r t !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Description q Notes No.

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

MHY2/MHW2

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust