V100

r e w q r e w q VG VP S070 VQ VKF N.C.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

3 Port Solenoid Valve Series VQ100 1

20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21,

VM

Body Body e Acrylic Piston Indicator window e Polyacetal Plug Piston A r Polyacetal Spring r Polyethelene Spring t Stainless steel NBR Packing t Stainless steel NBR O ring Dimensions Dimensions Panel mounted hole 3.5-64

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

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PFxx-OMK0003CN

PF-OMK0003CN-E PFMV5 [V] PFMV5 [V] -20No. PF-OMK0003CN-E PFMV505(F)-1 PFMV510(F)-1 [kPa] [kPa] [L/min] [L/min] PFMV530(F)-1 [kPa] [L/min] -21No. PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.

KJ

r t y No. q w e r t y u i o !

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3140-5G 3 sets (Single solenoid part no.) SY5140-5G 2 sets (Single solenoid part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-60-04U 1 set (Type 60, 4-station manifold base part no.) 10-SY3260-5G-C6 2 sets (Double solenoid part no.) 10-SY3160-5G-M5 2 sets (Single solenoid part no.)

SY

SY3140-5G . 2 sets (Single solenoid part no.) SY3240-5G . 2 sets (Double solenoid part no.)

SX

SX3240-5G 2 sets (Double solenoid part no.) SX3140-5G 2 sets (Single solenoid part no.) SY3000-26-9A 1 set (Blanking plate assembly part no.) One-touch fitting for 1/4" N7 One-touch fitting for 5/16" N9 SX5000 Type 42 (Common external pilot type) The asterisk denotes the symbol for assembly.

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

A

D I M E N S I O N S S E E N E X T P A G E NCDRB1BW30 P211180-1 NC_R1FW30 P211180-2 M O R E A C C E S S O R I E S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

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1 e !