VM

One way roller lever VM430-01-02 VM430-01-02S JIS Symbol 17 polyacetal or hard steel roller 4.0 mm P.T. 11 N F.O.F. 4-4.5 mounting hole 5.0 mm O.T. 9.0 mm T.T.

VM

One way roller lever VM430-01-02 VM430-01-02S JIS Symbol 17 polyacetal or hard steel roller 4.0 mm P.T. 11 N F.O.F. 4-4.5 mounting hole 5.0 mm O.T. 9.0 mm T.T.

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

VM

Roller Lever/VM430-01-01, VM430-01-01S JIS Symbol 12N F.O.F. 4mm P.T. 4.5mm O.T. 8.5mm T.T. One Way Roller Lever/VM430-01-02, VM430-01-02S JIS Symbol 11N F.O.F. 4mm P.T. 5mm O.T. 9mm T.T.

Proposals for Energy Saving

Application Model Actuator Basic type VM430-01-00 Polyacetal roller VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Roller lever VM430-01-01 VM430-01-01S Mechanical operation Manual operation Hard steel roller Polyacetal roller Hard steel roller One way roller lever VM430-01-02 VM430-01-02S Directional Control Equipment Straight plunger VM430-01-05 Polyacetal

CATALOG

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

V

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

Ozone Resistant

220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Tamper Proof and Flat Head Screw

ASD430F-02-08ST R 1/4 36.7 11 7 15 18.5 18.5 17 46.5 15.2 8 28.2 1.5 40.7 41.7 ASD430F-02-10ST 19.7 21 49.3 18.5 10 31 ASD530F-02-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-02-08ST 18.5 15.2 51.3 8 28.2 R 1/4 49.3 15.4 9.5 23 19.8 19 55.3 1.5 53.7 ASD530F-02-10ST 21 18.5 54.1 10 32.6 23.1 ASD530F-02-12ST 22 20.9 55.9 12 34.4 ASD530F-03-06ST 17 12.8 48.3 6 25.2 20.3 ASD530F-03-08ST 18.5 15.2 51.3

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

PFxx-OMJ0005CN

--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 749 AS20-D Series Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-06ST ASD430F-02-08ST ASD430F-02-10ST ASD530F-02-06ST ASD530F-02-08ST ASD530F-02-10ST ASD530F-02-12ST ASD530F-03-06ST ASD530F-03-08ST ASD530F-03-10ST ASD530F-03-12ST ASD630F-04-10ST ASD630F-04-12ST 12.9 13.7 13.7 18.5 17 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3 48.3 51.3

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow type Meter-out AS3201F-02 Meter-out AS3311F-02 Meter-out AS3301F-02 Component Parts Component Parts No.

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03