Table of Contents

Threaded type from 6A to 50A is standardized.

70pvvna

Threaded type from 6A to 50A is standardized.

Process Valve

Threaded type from 6A to 50A is standardized.

Air-hydro Unit

Threaded type from 6A to 50A is standardized. Operation from 0 MPa is possible.

Table of Contents

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

42

However, the maximum number of stations is 16. 1B 2A 2B 3A 3B 4A VFR 4B 5A 5B 6A 6B 7A 7B VQ7 1.

VQ4000

SOL.A 8A () (+) SOL.A 8A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 8B () (+) 8 stations SOL.B 8B SOL.A 9A () (+) SOL.A 9A SOL.B 9B () (+) 9 stations SOL.B 9B SOL.A 10A () (+) SOL.A 10A SOL.B 10B () (+) 10 stations SOL.B 10B (+) () COM COM Note) There is no polarity.

VFS

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 The asterisk denotes the symbol for assembly.

VQ5000

10B SOL.A 6A ( ) ( + ) SOL.B 6B ( ) ( + ) 6 stations SOL.A 7A ( ) ( + ) The internal wiring is double (connected to SOL.

Plug-in/Plug Lead: Single Unit

Polarity SOL.A 1A () (+) VQ5 SOL.B 1B () (+) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) VQZ SOL.B 2B () (+) 2 stations 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

10B SOL.A 6A ( ) ( + ) SOL.B 6B ( ) ( + ) 6 stations SOL.A 7A ( ) ( + ) The internal wiring is double (connected to SOL.

VDW

steel VDW Series 30 VQ VVCW20 6A LVM Material Note) Consists of a set for D and U sides.

AC Servo Motor Driver (Network card type ）

3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Release valve SOL.A 1A () (+) 1A SOL.B 1B (+) () 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A VQ5 1B 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Pressure switch SOL.A 2A () (+) 2A SOL.B 2B (+) () 2 stations 1.

VQ5000

SOL.A 8A () (+) 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A SOL.B 8B () (+) 8 stations 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) SOL.B 9B () (+) 9 stations SOL.A 10A () (+) SOL.B 10B () (+) 10 stations (+) () COM Note) There is no polarity. It can also be used as a negative common.

LEC-OM071xx

Communication Command Phases*2 Profile Command Operation Code (Hex.) 1 2 3 00 NOP No operation 05 ALM_RD*1 Read alarm/warning 06 ALM_CLR Clear alarm/warning state 1D MEM_RD*1 Read memory command Servo Commands 1E MEM_WR*1 Write memory command 30 SMON Monitor servo status 40 SVPRM_RD*1 Read servo parameter 41 SVPRM_WR Write servo parameter 1.

AC Servo Motor Driver (Pulse input type/Positioning type ）

25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

dB 3: -4 dB 0h x _ _ _ For manufacturer setting 0h Table 5.4 Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] 00 Disabled 10 562 01 Disabled 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D

LEC-OM07605CN

PB49]4(_ _ _ 1) _ _ x x 5.4 00h _ x _ _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h x _ _ _ 0h 5.4 [Hz] [Hz] 00 10 562 01 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D 310 0E 642 1E 300 0F 600 1F 290 PB18 LPF 3141 100 [rad/s] 18000 [Pr. PB23] [Pr.