Table of Contents

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .

Process Valve

External pilot solenoid Air operated Pilot Solenoid Valve Specifications Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ-Q Pilot solenoid valve SF4--23 SF4D DZ-23-Q Symbol Grommet, Grommet terminal Conduit terminal DIN terminal Grommet, DIN terminal VNA VNA Valve type Type N.C. N.O. C.O.

70pvvna

1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 10 (P2) Manual override VNA11 VNA12 12 (P1) 12 (P1) External pilot solenoid 1 (A) 2 (B) 2 (B) 1 (A) 17-4-7 4 Series VNA Port size 6A, 8A, 10A Applicable cable O.D. 6 to 8 (D.T) 125 (Conduit terminal: T DIN terminal: D) 108.2 (Grommet terminal: E) 106.7 (Grommet: G) 63 (Air operated) Pilot port (Back side P2) Manual override Courtesy of Steven Engineering, Inc

Air-hydro Unit

Threaded type from 6A to 50A is standardized. Operation from 0 MPa is possible.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC,

Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: Rc, Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliant: Q (CE Compliant)

1

2 t t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

Air Slide Table

the MXQ6(A, B).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Flow Characteristics Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Flow characteristics C (dm3/ (sbar) ) b Cv C (dm3/ (sbar) ) b Cv SS5Y3-41(-Q) SS5Y3-42(-Q) SS5Y5-41(-Q) C8 1 4 SS5Y5-42(-Q) C10 1 8 1 8 C6 C6 C8 1 4 0.20 0.20 0.45 0.43 0.66 1 4 SS5Y7-42(-Q) 0.23 0.20 0.16 0.12 0.12 0.81 0.82 1.9 1.9 3.0 0.18 0.18 0.44 0.46 0.75 0.19 0.20 0.23 0.20 0.25

Table of Contents

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

SQ1000/2000

R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ1230D Double (double solenoid): SQ1231D y e e q w y e e q w SQ1231D SQ1230D (A)(B) (A) (B) 4 2 4 2 5 13 5 1 3 (R1) (P)(R2) (R1)(P)(R2) u u 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 SQ1331 SQ1330 (A)(B) (A)(B) y e e q y e e q w w 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ1431 SQ1430 (A)(B) (A)(B) 4 2 4 2 5 1 3 (R1) (P)(R2)

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

flats H E E A B 2-P 2-P Port size A B Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats

VM

3 EA EA y A A P P r q B EB B EB !4 !7 !1 !2 t Componet Parts Aluminum alloy NBR Notes No. !1 !0 Description Material PBT ADC Material Notes No. q Description Piston guide B Valve Metallic plated Only external pilot style: ZDC Black zinc chromated Pilot body Body w e Stainless steel Return spring ZDC Head cover r Stainless steel Spool sleeve !2 !3 !4 Rubber Cushion !