Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

DL DM HR K Q Q M 20 20 21 28.5 40 B + Stroke L 25 21 21 29.5 41 E A + Stroke With rod end lock DM End lock mechanism Manual release Non-lock type ) ( 24 11 2-M5 x 0.8 4-N through D 1 Flat washer F Q B + Stroke L A + Stroke Rod end male thread H1 Bore size (mm) L1 H1 C1 X Standard stroke 18.5 10, 15, 20, 25 14 12 M8 x 1.25 28.5 20 50, 75, 100 32.5 M10 x 1.25 22.5 10, 15, 20, 25 C1 17.5 15

CQ2

SCQ2 Bore size B, #7.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B dimension is 24.5 mm.

NCQ2/CQ2

L F K M E J L Q Q A + Stroke B + Stroke A + Stroke B + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Compact Cylinder

L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Table of Contents

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

CQS

B + Stroke A + Stroke 20, 25 Rod end male thread Rod end nut Rod End Male Thread Bore size (mm) 12 16 20 25 H1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 X 10.5 12 14 17.5 L1 14 15.5 18.5 22.5 C1 9 10 12 15 Basic Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball AXT625-3A-10 Non plug-in type (For 10) (3) Note 1) For side ported Note 2) 1: A, B port size Rc 1/8, 2: A, B port size Rc 1/4 Note 3) Please contact SMC if parts except for 10/01T/01T1 are needed.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball AXT625-3A-10 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Compact Cylinder Series CQS

Technical data 595 Series CQSS Proper Auto Switch Mounting Position (Detection at stroke end) Non-rotating rod a) b) Mounting 16 to 25 12 a) b) Mounting D-A9 D-A9V Hs Hs D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL Hs Hs Proper Auto Switch Mounting Position Auto switch model Bore size (mm) A B W B W A B A Hs Hs B A D-A9V D-M9V/M9WV/M9AVL D-M9/M9W D-A9 12 16 20 25 5.5 4.5 19.5 5.5 17 5.5 4.5 1.5

1

2 t t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

2

)-B/AR25(K)-B t e q IN OUT t Modular F.R.L. e q r IN OUT w r w AC-A AC-B AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

Compact Hydraulic Cylinder

+ l J MM FY BB D E e Air release K F MA l mC f Air release 10 NA FT A SS NB mB SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ CHQ CHKm CHN CHM CHSm CH2m CHA Related Equipment D-m (mm) With rod boot Stroke range (mm) Bore size (mm) e FD J B BB C F GA GB M NA NB P R S FT FX FY FZ SS l f Q B-rod C-rod B-rod C-rod 32 27 15 52 M10 x 1.25 58 62 38 14 21 15 11 37 31 3/8 39 130

Hydraulic

+ l R J MM FY BB D E e Air release Width across flats G K F MA l C f Air release 10 NA FT A SS NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25

Table of Contents

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts