Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: B (FKM), Thread: Rc, Port Size: 8A (1/4), Voltage: 3 (110VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor)

Size: ø10, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: FKM, Thread: Rc, Port Size: 1/4, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: B (FKM), Thread: Rc, Port Size: 8A (1/4), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor)

Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: B (FKM), Thread: Rc, Port Size: 8A (1/4), Voltage: 1 (100VAC 50/60HZ), Lead Wire: GS (Grommet w/Surge Suppressor)

Size: 1 (ø10), Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: B (FKM), Thread: Rc, Port Size: 8A (1/4), Voltage: 1 (100VAC 50/60HZ), Lead Wire: G (Grommet), Manual Override: B (Locking Style Slotted)

Size: ø10, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: FKM, Thread: Rc, Port Size: 1/4, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet w/Surge Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliant: -

Size: ø10, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: FKM, Thread: Rc, Port Size: 1/4, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet, Manual Override: Locking Style Slotted, Bracket: -, X200: -, CE Compliant: -

Table of Contents

Orifice and Port Size Combinations Class Orifice size (mm) T Conduit terminal (1) Port size 4 2 3 7 5 10 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 (8A) Available types of electrical entry are either G, C and T.

2

M Q Q Note) D is maximum diameter.

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

2/3 Port Valve

/30m Steel tube, full pressure/0.97MPa VNC1(N.C. 0.49MPa) VNC4(N.C. 0.97MPa) How to Calculate Flow Speed v=212 X Q/d2 (Symbol) v: Flow speed(m/s) Q: Flow rate(l/min) d: Piping bore size(mm) 4.2-22 VNC Port size: 6A, 8A, 10A Thread connection VX VN VQ Port size Rc(PT) Model 1 8 1 4 3 8 VNC1-6A VNC1-8A VNC1-10A EZ, TZ, DZ: 9mm longer 4.2-23 VNC Port size: 10A, 15A, 20A, 25A Thread connection

Air Slide Table

ZZ MXQ 8A-mm2 With end lock (8) Pilot port 2 x M5 x 0.8 Dimensions Q 5 J [mm] Model J Q MXQ8A-10Zm2 61.5 5.5 30 MXQ8A-20Zm2 71.5 MXQ8A-30Zm2 81.5 MXQ8A-40Zm2 97.5 MXQ8A-50Zm2 124.5 MXQ8A-75Zm2 139.5 43 7.5 0.5 5 8.5 38 3 3 26.4 3 MXQ8A-75Z2 5.5 5 J * Dimensions other than those listed above are the same as those for the standard type.

42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Table of Contents

ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.