1

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring is double wiring (connected to SOL. a and SOL. b) regardless of number

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

42

Polarity 2 x G3/4 Electrical entry 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A Release valve 10B SOL.B 10A SOL.A 9B SOL.B 9A SOL.A 8B SOL.B 8A SOL.A 7B SOL.B 7A SOL.A 6B SOL.B 6A SOL.A 5B SOL.B 5A SOL.A 4B SOL.B 4A SOL.A 3B SOL.B 3A SOL.A 2B SOL.B 2A SOL.A 1B SOL.B 1A SOL.A () (+) 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 1A 1 station (+) () 1B SV Pressure switch

VFS

2 VFS6000-8A !

VQ4000

SOL.A 8A () (+) SOL.A 8A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 8B () (+) 8 stations SOL.B 8B SOL.A 9A () (+) SOL.A 9A SOL.B 9B () (+) 9 stations SOL.B 9B SOL.A 10A () (+) SOL.A 10A SOL.B 10B () (+) 10 stations SOL.B 10B (+) () COM COM Note) There is no polarity.

VQ5000

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

LEC-OM07605CN

USB 8A.1 USB SD 8E.1 USB SD 8E.2 USB SD 8E.3 USB SD 8E USB 8E.4 USB SD 8E.5 USB SD 888 88._ DB 1. ,30 2. 3.

V100

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

LEC-OM02904

SSCNET 8A USB USB USB USB 8 15 8 (2) 8E USB ()USB 1. USB USB 12 () 2. () (1) CPU 1. 888 2. CPU 1. 2. 1. 888 2. MR Configurator2 TMMR Configurator2 TM/ 8.3 (E3) 30 (E0) 1(E1) E6E7E9OFF TM MR Configurator2 92 1. 2. 3V() 3 96 1. 2. 8 16 8 9F 3.2V( ) E0 85 1. 2. 3. 4.

Size: 1 [ø7], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR seal), Thread: Rc(PT), Port Size: 10A (3/8), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal)

Size: 1 [ø7], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR seal), Thread: Rc(PT), Port Size: 6A (1/8), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal)

Size: 1 [ø7], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 3/8, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: -, Bracket: -, CE Compliant: -

Size: 1 [ø7], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1/8, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: -, Bracket: -, CE Compliant: -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45