Actuation Type: 6 (3 Position Double Check), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1

Actuation Type: 6 (3 Position Double Check), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2)

Actuation Type: 6 (3 Position Double Check), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2), Thread: N (NPT)

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

42

*VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

VQ5000

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3-Rc 1/2 1(P), 4(A), 2(B) port M5 ground screw SMC 26.5 16 4(A), 2(B) port 31.5 37 41 50 98 G1/2 Electrical entry PE X P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5600

1

Manifold Metal Base Plug-in Page 40 Type 50/ Side ported Type 51/ Bottom ported Type 52/ Top ported Type 50/Side Ported, Type 51/Bottom Ported, Type 52/Top Ported Page 41 Metal Base Plug-in D-sub connector D-sub Connector, Flat Ribbon Cable, PC Wiring System [IP40] Flat ribbon cable Page 43 Type 50/Side Ported Page 43 Type 51/Bottom Ported PC wiring Page 63 Type 52/Top Ported Page 68 Wiring

ISO Cylinder

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to

SY

/location) SUP/EXH block assembly (standard): SX3000-51-2A SUP/EXH block assembly (R type): SX3000-51-6A SUP/EXH block assembly (S type): SX3000-51-7A SUP/EXH block assembly (RS type): SX3000-51-8A 6 5 4 C4 3 2 1 Stations or layout 2 position Single solenoid a C 6 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

Stations SYJ Seal Metal seal Rubber seal VVQ2000-10A-1 3 m VQ2200-51 Enclosure VQ2200-51 VQ2200-51 0 1 VQ2200-51 VQ2100-51 Nil SZ VQ2100-51 VQ2100-51 Dust-tight, Waterjet-proof (IP65) W Note) VF Type of actuation Note) T/L/S/M kit only.

Table of Contents

Silencer (AN203-KM81 pc) 51 26 16 2.

Air Cylinder

CG1 With Rod Trunnion With Head Trunnion CG3 Z + Stroke TX CD Z + Stroke TX JMB CD MB 51 40 3.2 3.2 40 51 MB1 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 CA2 57 6.8 x 3.4 (mm) CS1 Mounting Part no.

CATALOG

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread C B 10 55.5 32.5 23 20 93.5 42.5 51 30 103.5 52.5 40 139.5 62.5 77 50 149.5 72.5 10 13 21 D2 10 56 33 23 20 94 43 51 30 104 53 40 140 63 77 50 150 73 16 21.5 Construction p. 118 B5 04 06 N6 U6 Buffer Assembly p. 124 J: 2.5 K: 2 M10 x 1 A10 14 3 8 M5 x 0.8 10 57.5 34.5 23 20 95.5 44.5 51 30 105.5 54.5 40 141.5

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36