Stations: 3 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

V100

VV317-02-051-02-A Valve stations A port size (Base piping) 1/4 Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs. PVT317-53-1A 1 pc.

Table of Contents

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VV317 05 1 A 02 02 CE-compliant Base type: 1/4 Nil Q CE-compliant VV317-02-051-02-A VT317 manifold Option Please indicate manifold base type, applicable manifold valve and blanking plate when ordering. Nil A Without mounting bracket With mounting bracket Common exhaust type only Thread type Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs.

VT317

VV317-02-051-02-A Valve stations A port size (Base piping) 1/4 Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs. PVT317-53-1A 1 pc.

ISG

ISG121-030 ISG221-030 Stainless steel 316 None 0.02 to 0.35 Cable gland ISA2 ISG121-031 ISG221-031 Stainless steel 316 Yes 0.02 to 0.45 Type A IS ISG130-030 ISG230-030 Brass, Phosphor bronze None 0.03 to 0.4 20a ISG130-031 ISG230-031 Brass, Phosphor bronze Yes 0.03 to 0.6 20b ZSM 0.1 to 1.0 1.5 0.02 ISG131-030 ISG231-030 Stainless steel 316 None 0.03 to 0.4 20c PF2 ISG131-031 ISG231-031

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

One-touch Fittings

-01N, KQ2E06-02N KQ2E06-03N, KQ2LE06-00N KQ06-P01A KQ2E06-00A, KQ2E06-01A, KQ2E06-02A KQ2E06-03A, KQ2LE06-00A Pipe nut Pipe nut KQ08-P01N KQ2E08-00N, KQ2E08-01N, KQ2E08-02N KQ2E08-03N, KQ2LE08-00N KQ08-P01A KQ2E08-00A, KQ2E08-01A, KQ2E08-02A KQ2E08-03A, KQ2LE08-00A KQ10-P01N KQ2E10-00N, KQ2E10-02N, KQ2E10-03N KQ2LE10-00N KQ10-P01A KQ2E10-00A, KQ2E10-02A, KQ2E10-03A KQ2LE10-00A KQ12-P01N KQ2E12

VZA200/400

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

VZA200/400

VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

VZ3000

(Example) VV5Z3-40-031-M5 1 pc. (Manifold base) VZ3140-5G-M52 pcs. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) VV5Z3-43-031-C41 pc. (Manifold base) VZ3140-5LZ1 pc. (Valve) VZ3240-5LZ1 pc. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) EVS VFN The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Manifold Specifications

(Example) VV5Z3-40-031-M5 1 pc. (Manifold base) VZ3140-5G-M52 pcs. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) VV5Z3-43-031-C41 pc. (Manifold base) VZ3140-5LZ1 pc. (Valve) VZ3240-5LZ1 pc. (Valve) DXT192-13-1A1 pc. (Blanking plate assembly) EVS VFN The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.