High Vacuum Angle Valve

Material Valve size 16 25 40 50 63 80 Exterior seal r Standard AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401

2

AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 Flow Control Equipment 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8 47.7 32.7 20.6 58

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 4 Stations, Symbol: 3, Port Size: 02 (1/4)

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 4 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: VPA300, Exhaust Type: Individual Exhaust, Stations: 4 Stations, Symbol: 3, Port Size: 1/4, Thread Type: -

Model: VPA300, Exhaust Type: Individual Exhaust, Stations: 4 Stations, Symbol: 3, Port Size: 1/4, Thread Type: NPT

Air Pilot Operated

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

Air Pilot Operated Series NVSA

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

with 02 2 stations "-02T' is l/S" P,A,B bottom and 1/4" A,B side.

CATALOG

58 45 125 199 42 1-1/4-12 58 45 M30x1.5 140 199 42 58 40 140 199 42 1-1/4-12 58 45 M36x1.5 160 219 47 64 50 160 219 47 1-3/8-12 64 50 Note) Dimensions are the same for Standard and Switch Capable Courtesy of Steven Engineering, Inc. !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Such a place is likely to cause malfunction. 42 Series EX260 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and Operation Manual for 3/4/5 Port Solenoid Valve Precautions.

V

One Touch Fittings for 10 (SY7000 Only) Imperial (Inch) M5T 10~32Nom (SY3000 Type41 Only) 01T 1/8NPTF (SY5000 Type 41 & SY3000 Type 42 Only) 02T 1/4NPTF (SY5000 Type 42 Only_ N3T One Touch Fittings for 5/32 (SY3000 Only) N7T One Touch Fittings for 1/4 (SY3000 & 5000 Only) N9T One Touch Fittings for 5/16 (SY5000 Only) N11T..One Touch Fittings for 3/8 (SY7000 Only) 3 SY3000 5 SY5000 7 SY7000

XL-OMY0002

.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227 ** S XLD40-2-9-1A XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

XLDV Series

Material 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal 3 Specific AS568-043** AS568-045** AS568-050** AS568-167** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal 2 Specific AS568-233** B2401-V85** AS568-349** B2401-G155** Standard XLD80-2-9-3A XLD80-2-9-3A XLD100-2-9-3A XLD160-2-9-1A S valve seal assembly 4 Specific Note1) List the optional

XMD/XYD Series

Material 25 40 50 63 80 Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V External seal (3) Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 ** Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Valve seal (2) Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 ** Standard XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-

High Vacuum L Type Valve

Material 63 80 100 160 Exterior seal (3) Standard AS568-043V AS568-045V AS568-050V AS568-167V Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S Valve seal Standard XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Specific XLD63-2-9-1A ** XLD80

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch

SV

Port sizes of X, PE port for external pilot specification (R, RS) are 4 (metric), 5/32" (inch) for SV1000/2000 and 6 (metric) and 1/4" (inch) for SV3000/4000. 1-2-45 42 Series SV The serial transmission system reduces wiring work, while minimizing wiring and saving space. Maximum 16 stations (Specify a model with more than 9 stations by means of the manifold specification sheet.)

Series SV

L dimension Weight (g) 460.5 448 435.5 423 410.5 398 385.5 373 360.5 585.5 573 560.5 548 535.5 523 510.5 498 485.5 473 610.5 598 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 105.4 103.1 100.9 98.6 96.4 94.1 91.9 89.6 87.4 85.1 109.9 107.6 62 61 60 59 49 58 48 57 47 56 46 55 45 54 44 53 43 52 42 51 50 No.