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or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

VFS

For 30 type, common external pilot (on manifold side).

2

IDF37E-30 IDF55E-30 IDF75E-30 IDU22E-30 IDU37E-30 IDU55E-30 IDU75E-30 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 30 mA 25 46 125 10 A 60 39 200 V type 60 81 148 50 36 73 133 IDF75E-30, IDU75E-30 IDF100F IDF125F IDF150F IDF190D IDF240D IDF370D 15 A 74 151 46 50 122 146 30 A 60 60 55 148 36 70 73 166 50 A IDF100F to 150F

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Base Mounted Wiring: Common Exhaust, Stations: 15 Stations, Thread: NPTF

Base Mounted Wiring: Common Exhaust, Stations: 15 Stations, Thread: -

Base Mounted Wiring: Common Exhaust, Stations: 15 Stations, Thread: G

Base Mounted Wiring: 30 (Common Exhaust), Stations: 15 Stations, Thread: T (NPTF)

Base Mounted Wiring: 30 (Common Exhaust), Stations: 15 Stations

Base Mounted Wiring: 30 (Common Exhaust), Stations: 15 Stations, Thread: F (G)

1

SY7000221-1A [for 10 valves (30 pcs.)] SY7000222-1A [for 10 valves (30 pcs.)]

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

Air Cylinder

190 199 25 87 144 153 112 169 178 137 194 203 32 89 149 161 114 174 186 139 199 211 164 224 236 40 113 178 190 138 203 215 163 228 240 188 253 265 213 278 290 Clevis Pivot Bracket (mm) Bore size LD LF LG LH LP LT LV LY 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 LZ LZ LZ LZ LZ 20 6.8 15 30 30 37 3.2 18.4 59 177 202 227 25 6.8 15 30 30 37 3.2 18.4 59 181 206 231 32 9 15 40 40 50

CM2

l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97 110 135 160 185

CM2

8 M8 X 1.25 13 20 8 41 20 M10 X 1.25 17 6 M26 X 1.5 15 14 9 33.5 9 22 30 30 5.5 19.5 10 30 10 13 25 8 45 26 M10 X 1.25 17 6 M26 X 1.5 15 14 9 37.5 9 22 34.5 30 5.5 19.5 10 30 12 13 32 8 45 26 M14 X 1.5 M32 X 2 22 8 21.5 18 10 46.5 11 24 42.5 38 7 21 15 39 14 16 40 11 50 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore

C76

0 0.033 32 40 M30 x 1.5 G 1/8 30 58 23.8 10 9 12.2 M10 x 1.5 38 0 0.039 M10 x 1 M38 x 1.5 G 1/4 35 69 28.3 12 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to