SMC's VQ7-6/7-8 series valve conforms to ISO standard 5591/I.  A choice of metal or rubber seal increases compatibility with various operating and environmental conditions.  Manifolds are available with a wide range of interface options to meet a variety of application requirements.  The VQ7-6/7-8 has a smaller, space-saving profile and is lighter in weight than the VS7/VP7 series. Manifold

Stations: 2 Stations, AB Port: C6L (One-touch Fitting for ø6 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 2 Stations, AB Port: C6L (One-touch Fitting for ø6 Tube, Left), AB Thread: Rc, Control: None, PR Port: C12B (One-touch Fitting ø12, Both Sides), PR Thread: Rc, Silencer: SB (Silencer Box)

Stations: 2 Stations, AB Port: C6L (One-touch Fitting for ø6 Tube, Left), AB Thread: Rc, Control: None, PR Port: C12B (One-touch Fitting ø12, Both Sides)

PSxx-OMU0002CN

33 () () DC(-)() () * -6No.PS-OMU0002CN-D ( ) () CE -550(5) * 1015 10 1% 2264 LCD * -7No.PS-OMU0002CN-D M5 ISE20A X M 3 ISE20A -0.100~1.000 Mpa Y ZSE20A 0.0~-101.0 kPa K ZSE20AF -100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L

PSxx-OMU0005CN

) ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L

ZSE30A(F)/ISE30A

R1/8 (M5 female threaded) Option 2 ISG Nil None Bracket A N01 NPT1/8 (M5 female threaded) ZSM1 Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting 1/4 inch A2 Elbow type C4L One-touch fitting 4 mm, 5/32 inch Bracket C C6L One-touch fitting 6 mm A3 N7L One-touch fitting 1/4 inch Panel mount adapter Unit specifications Option 1 With

PSxx-OMS0006CN

-0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F -100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L

PSxx-OML0002CN

11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A 3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L

PFxx-OMJ0005CN

/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3

Table of Contents

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

ZSE30/ISE30

R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting C4H Output specifications Panel mount 25 65 26 28 NPN output PNP output 1 to 5 V output 4 to 20 mA output C6H 6 One-touch fitting B N7H 1/4" One-touch fitting Elbow type 4 One-touch fitting 5/32" One-touch fitting C4L Panel mount adapter + Front protective cover C6L

VQ7-6/7-8

and 5 (R1). 2(B), 4(A) port piping connection Rc1/4 (right side) Rc3/8 (right side) Rc1/4 (left side) Rc3/8 (left side) Rc1/4 (bottom) Rc3/8 (bottom) One-touch fitting 6 (right side) One-touch fitting 8 (right side) One-touch fitting 10 (right side) One-touch fitting 6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L

Stations: 10 Stations, AB Port: 1/4, Right, AB Thread: Rc, Control: None, PR Port: 1/4, Top, PR Thread: Rc, Silencer: Silencer Box, Voltage: -

Stations: 10 Stations, AB Port: 02R (1/4, Right), AB Thread: Rc, Control: None, PR Port: 02U (1/4, Top), PR Thread: Rc, Silencer: SB (Silencer Box)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)