2

02l M14 x 1 17 17 28.4 14 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03l M14 x 1 19 17 30.7 16.3 15 13.3 13.1 10.4 4.5 35.9 8 1/8 KQ2E08-01l M16 x 1 17 19 24.1 6.7 17 14.2 26.1 18 6 30.5 1/4 KQ2E08-02l M16 x 1 17 19 28.4 11 17 14.2 26.1 18 6 33.1 3/8 KQ2E08-03l M16 x 1 19 19 31.7 14.3 17 14.2 26.1 18 6 37.4 Connection thread Rc 10 1/4 KQ2E10-02l M20 x 1 22 24 29.3 9.9 21 15.6 41.5 29.5 7.5 63.8

Stations: 7 Stations, AB Port: 1/4, Left, AB Thread: Rc, Control: None, PR Port: 3/8, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 7 Stations, AB Port: 1/4, Left, AB Thread: Rc, Control: None, PR Port: 3/8, Bottom, PR Thread: -, Silencer: -, Voltage: -

Stations: 7 Stations, AB Port: 1/4, Left, AB Thread: Rc, Control: None, PR Port: 1/4, Bottom, PR Thread: -, Silencer: -, Voltage: -

Stations: 7 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 7 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 03D (3/8, Bottom)

Stations: 7 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 02D (1/4, Bottom)

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

4 10 30 Atmospheric vent port N02L 02L: 60.5 N02L: 61 NPT1/4 2 M5 x 0.8 Thread depth 5 Piping port 02L: R1/4 N02L: NPT1/4 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. * For tubing, please use the SMC TU0425 (

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

PFxx-OMJ0005CN

12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

VQ7-6/7-8

piping connection at ports 3 (R2) and 5 (R1). 2(B), 4(A) port piping connection Rc1/4 (right side) Rc3/8 (right side) Rc1/4 (left side) Rc3/8 (left side) Rc1/4 (bottom) Rc3/8 (bottom) One-touch fitting 6 (right side) One-touch fitting 8 (right side) One-touch fitting 10 (right side) One-touch fitting 6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L

Stations: 5 Stations, AB Port: 02L (1/4, Left), AB Thread: F (G), Control: None, PR Port: 03B (3/8, Both Sides), PR Thread: F (G)

Stations: 10 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

90

ITVH With digital pressure switch: IR10l0-01lEl-A ITVX 42 PVQ M10 x 1 25 31 7.5 VY1 Mounting hole M28 x 1.5 1.6 VBA VBAT 4.5 2 x 1/8 Port size BLEED 90.5 AP100 53.5 45.9 37.6 9.8 OUT IN 30 EXH 57 EXH 2 x 1/8 Pressure gauge port 35 801 IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR20l0-02l-A 12.5 48 2 Bracket 30 Mounting hole for hexagon panel nut 48 Bracket (Option) 30 Max

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Area: (800) 258-9200-www.stevenengineering.com 1/4 (Right side) 3/8 (Right side) 1/4 (Left side) 3/8 (Left side) 1/4 (Bottom) 3/8 (Bottom) 6 One-touch fitting (Right side) 8 One-touch fitting (Right side) 10 One-touch fitting (Right side) 6 One-touch fitting (Left side) 8 One-touch fitting (Left side) 10 One-touch fitting (Left side) Mixed 02R Blanking plate (Filter, Regulator) 03R VZS 02L

Table of Contents

Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L

VQ7-6/7-8

Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L

PSxx-OMU0008CN

L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L

PSxx-OMM0002CN

Mpa A 0.8[V]3.2[mA] -51No.PS-OMM0002CN-F Z/ISE80(F)-02/N02/F02/C01/A2/B2/-* 5 4 5 -C01Rc1/8 -F02G1/4 -B2TSJ1/4 -A2URJ1/4 -52No.PS-OMM0002CN-F Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-* 4 5 5 -C01LRc1/8 -A2LURJ1/4 -B2LTSJ1/4 -53No.PS-OMM0002CN-F () ZS-24-A A () ZS-24-D A -54No.PS-OMM0002CN-F () ZS-35-A -55No.PS-OMM0002CN-F ZS-35-C 36 x n +4 x (n -1) -56No.PS-OMM0002CN-F ZS-35-B 36