Series AK1000

Forword 1 Caution Air operated type Diaphragm Valves for General Applications Series AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Forword 1 Caution Air operated type Diaphragm Valves for General Applications Series AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code

Shock Absorbers and Rate Controls

9 .R)0EMt.25 5.5 9.5 4t.3 58.844.5?8.6 M5 30 Prtl!+-l2 M5t?91$53 (rR)0tM% 8.612.7 60.57 6.2 \7 '' 41.4 Rttt42xl.5 M52940053 (Ln)0Il,lr.5M 8.6t2.7 60.57 6.2 57 .2 41.4 M8 260 Rt[E5x2 M5ffim530$13.0 13.519.1r0 t.5127.0 101.6 1b.2 Lil S A lciimensions in millimeters. qiffi.

Free Mount Cylinder

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Air Pilot Operated Series NVSA

Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

Table of Contents

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Table of Contents

-2-14 15 F.R.L.

Table of Contents

22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5

V100

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

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. ~ .,6 1>20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

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-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

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-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

ARJ1020F

G PPA AL 14-4-7 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-4-8 6 Miniature Regulator Series ARJ310 F.R.L.

Vacuum

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

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avajlable with prest input type 13 100e,6 ouFd at 0% input 076 outpu at 100% inpl.Jt 14 MPa dbpaly uniis only 15 Port size 2 (1/4:) mV 16 Right angla L cable rrct a!

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P ] . ' : ' 1 l I -l% "t , 4,;4 '* ili: 103.5 \o4 , @6, 65/32" , @1 14') compact ir!.' ' Switches Series ISE30/ZSE30 ZSESO t r I T t r ISE3O I l o o 1,-"".',-H' wtres 816" ([,45 female NPT1/8' (M5 female 04 straiohl one{ouch 04 elbow onelouch oO elbow one-touch No lead wires 2m lead wirc ffth connector Output type Ser'es lSE40.

CC

2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 314 264 491 412 804 691 1260 1100 1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 8 20 10 25 12 32 14

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals Supply Ar Pressure kgl/cm, Example: Find the_tubing volume for lD of 5mm and lenoln ol Im, Solution: Finl the intersection of a vertical line up from tube length