VM

Actuator Application Model VZM550-01-00 Basic Polyacetal roller Mechanical operation Manual operation Roller lever VZM550-01-01 VZM550-01-01S VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Hard steel roller One way roller lever VZM550-01-02 VZM550-01-02S Polyacetal roller Hard steel roller Straight plunger VZM550-01-05 Polyacetal roller Hard steel roller Roller plunger VZM550

VM

Actuator Application Model VZM550-01-00 Basic Polyacetal roller Mechanical operation Manual operation Roller lever VZM550-01-01 VZM550-01-01S VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Hard steel roller One way roller lever VZM550-01-02 VZM550-01-02S Polyacetal roller Hard steel roller Straight plunger VZM550-01-05 Polyacetal roller Hard steel roller Roller plunger VZM550

Micro Mechanical Valve Series VM1000

Weight (g) Application Actuator Model Polyacetal roller 110 140 150 150 160 180 180 180 170 Basic VZM550-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM550-01-01 VZM550-01-01S Hard steel roller One way roller lever VZM550-01-02 VZM550-01-02S Polyacetal roller Hard steel roller Straight plunger VZM550-01-05 VM VM Polyacetal

VM

Application Model Actuator Basic VZM550-01-00 VZM550-01-01 VZM550-01-01S VZM550-01-02 VZM550-01-02S Mechanical operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Polyacetal roller Hard steel roller Roller lever Polyacetal roller Hard steel roller One way roller lever Straight plunger VZM550-01-05 Polyacetal roller Hard steel roller Roller plunger VZM550-01-06 VZM550-01

CATALOG

-00 3/16-18 17.46 34 15.08 16.5 3.5 6 KQE06-00 M14x1 17 34.5 15 17 13.1/13.1 1/4 KQE07-00 5/16-18 17.46 34.5 15.08 17 4.6 8 KQE08-00 M16x1 19 38 17 18.5 26.1/18 5/16 KQE09-00 3/4-16 22.23 38 19.8 18.5 6 10 KQE10-00 M20x1 24 42.5 21 21 41.5/29.5 3/8 KQE11-00 1/8-14 25.4 42.5 23 21 7 12 KQE12-00 M22x1 27 44.5 23 22 58.3/46.1 1/2 KQE13-00 1-12 28.6 44.5 26.2 22 9.6 16 KQE16-00 M26x1.5 30 49.5

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

Ozone Resistant

80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

Table of Contents

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

Table of Contents

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

VFR

Easy maintenance ARBF5050-00-P-2 P port regulation ARBF5050-00-P-1 VFS ARBF5050-00-A-1 ARBF5050-00-A-2 A reduced pressure SUP block disk When 2 or more pressures (high and low) are supplied to one manifold, insert a disk between the stations which are supplied different pressures.

PFxx-OMJ0005CN

50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01

Tamper Proof and Flat Head Screw

Franklin Road Indianapolis, Indiana 46226 1-800-SMC-SMC1 (762-7621) www.smcusa.com US98-E456/E457 4/00 Tamper Proof and Flat Head Screw Driver Adjustable Speed Controller Tamper Proof Type Flow rate can be adjusted with a special tool For extra protection against inadvertent operation Special tool Part no.: AS-T-1 Flat Head Screw Driver Adjustable Type Flat head screw driver Flow rate can

1

P A1 B1 1(P) port Pressure gauge option 4(A) port (P controlled type, A port regulation) M1 00 N0 No pressure gauge 2(B) port (P controlled type, B port regulation) Pressure gauge with MPa display Note 2) Pressure gauge with psi display Mounting screw Base gasket Connector gasket SY50M-M1(Without pressure gauge) SY50M-00/N0(With pressure gauge) SY70M-M1(Without pressure gauge) SY70M-00/N0

Vacuum System Peripherals:

-00-2 Polycarbonate Part no: G46-00-00-3 GZ46 GZ46-2 Material Brass (Electroless nickel plated) Brass Precautions Brass With attachment cover assembly Be sure to read before handling.

Vacuum

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

Vacuum

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

Cylinder

le ' CP-FOO6 CP-F010 ,CP-F01 5 F00~ . CP-L006ICP-LOHi jCP-i:015 10 5, 10, 1 5, 20 ,(25)~ 30 Tluhnlmfwrth pi~): CP-T006Ic P-TOlO lCP-T015 15 5,1 0,15, 20, (25 )~ 30 ItI Smm spacer is added to the 30mm stroke cylinder.

Number of Ports: 3 Port, Piping Direct., Plunger Length: 1 (Side Ported, Short), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 00 (Basic), Suffix: None, Indicator: None, Bracket: B (w/Bracket)

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 00 (Basic), Suffix: None, Indicator: None, Bracket: B (w/Bracket)

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 00 (Basic), Suffix: None, Indicator: None