VM

VZM550-01-30R VM-30CR Red VM-30CB Black VZM550-01-30B Push button (Mushroom) VM-30CG Green VZM550-01-30G VM-30CY Yellow VZM550-01-30Y VZM550-01-32R VM-32CR Red VM-32CB Black VZM550-01-32B Push button (Extended) VM-32CG Green VZM550-01-32G VM-32CY Yellow VZM550-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM550-01-33 VZM550-01-34R VM-34CR Red VM-34CB Black VZM550

VM

VZM550-01-30R VM-30CR Red VM-30CB Black VZM550-01-30B Push button (Mushroom) VM-30CG Green VZM550-01-30G VM-30CY Yellow VZM550-01-30Y VZM550-01-32R VM-32CR Red VM-32CB Black VZM550-01-32B Push button (Extended) VM-32CG Green VZM550-01-32G VM-32CY Yellow VZM550-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM550-01-33 VZM550-01-34R VM-34CR Red VM-34CB Black VZM550

Micro Mechanical Valve Series VM1000

-34CY VM-36C Push button (Flush) VZM550-01-33 177 VH VZM550-01-34R Red Black VZM550-01-34B Twist selector (2 position) 178 VHS Green VZM550-01-34G Yellow VZM550-01-34Y Key selector (2 position) VZM550-01-36 VHS 197 170 Black Push-pull VZM550-01-37 Note 1) Actuator replacement is available for all types.

VM

VM-30CR VZM550-01-30R Push button (Mushroom) Black Green Yellow VM-30CB VZM550-01-30B VM-30CG VZM550-01-30G VM-30CY VZM550-01-30Y VM-32CR VZM550-01-32R Red VM-32CB VZM550-01-32B Push button (Extended) Black Green Yellow With a set of red, black, green, yellow Manual operation VM-32CG VZM550-01-32G VM-32CY VZM550-01-32Y Push button (Flush) VM-33C VZM550-01-33 Red VM-34CR VZM550-01-34R Twist

CATALOG

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

Table of Contents

33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension

PFxx-OMJ0005CN

1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1/4)DIN -12No.PF-OMJ0005CN-I LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Table of Contents

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) P = 33 (Pitch) P = 33 Manual override (Non-locking) Stations D side Exhaust cleaner (Option) U side Exhaust cleaner (Option) U side mounting 2-Rc 1/8 (X port) 2-Rc 1/8 (PE port) 6-Rc 1/2 Stations n: Station Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261

VFR

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) P = 33 (Pitch) P = 33 Manual override (Non-locking) Stations D side Exhaust cleaner (Option) U side Exhaust cleaner (Option) U side mounting 2-Rc 1/8 (X port) 2-Rc 1/8 (PE port) 6-Rc 1/2 Stations n: Station Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

13.5 6.3 12.7 9.3 40.7 5.2 31.9 5/32" 15 33 53.2 12.8 35.2 17 6.7 12.3 7.2 1.2 16.5 11.4 50 6.2 32.8 3/16" 21 15.5 7.2 1.2 36 59.8 15.2 36.5 18 8.1 17 13.2 52.2 7.1 33.7 1/4" 19 56 59 12.8 45 17 7.4 16.5 11.4 52.2 6.2 34.9 3/16" 35 60 64.4 15.2 45.8 18 8.2 15.5 7.2 1.2 17 13.2 54.4 7.1 35.7 1/4" 33 20.6 9.8 1.2 64 71.6 18.5 47.3 21 9.8 18 15.2 59.8 8.1 36.7 5/16" 36 68 76 20.9 48.5 22 11

1

To obtain the weight with valves attached, add the valve weights given on page 19, and to include the cable weight, add the connector cable weight on page 33.

Vacuum

1 5 33 5 20 M5 x 0.8 I M8 x 124 1 0 2A 5.5 I 20 50 9 I 5 Deptt I 1 9 24.5 97 .aiz, 42 5 24 M5 x 0.8 1 0 \.410x 1.2i 32 6.6 t J . c 24 52 1 0 11 Depth 1 1 5 21 30.5 109 Shorter pron e un ts are ava lab e wnhoul magnel ior auloswilch capabil 1y tUGrDUl s16-sg2 26 5 1 4 M4 x 0.7 5 1 8 4.5 4 40 7.5 7.6 Deptf 12.5 3.5 1 5 . 5 74.5 29 5 M4 x 0.7 6 8 I 1 6 46 9 9.5 Deptf 8 '13.5 5 19.5 89 33 5 20

Vacuum

1 5 33 5 20 M5 x 0.8 I M8 x 124 1 0 2A 5.5 I 20 50 9 I 5 Deptt I 1 9 24.5 97 .aiz, 42 5 24 M5 x 0.8 1 0 \.410x 1.2i 32 6.6 t J . c 24 52 1 0 11 Depth 1 1 5 21 30.5 109 Shorter pron e un ts are ava lab e wnhoul magnel ior auloswilch capabil 1y tUGrDUl s16-sg2 26 5 1 4 M4 x 0.7 5 1 8 4.5 4 40 7.5 7.6 Deptf 12.5 3.5 1 5 . 5 74.5 29 5 M4 x 0.7 6 8 I 1 6 46 9 9.5 Deptf 8 '13.5 5 19.5 89 33 5 20

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

D1 D2 D3 L1 L2 L3 L4 M1 AS1001F-01D 1/8" 8.4 38 4.5 26 AS1001F-23D 3.2 8.4 38 4.5 26 12.7 12.7 AS1001F-03D 5/32" 9.3 39.2 5.2 26.6 AS1001F-04D 4 10 4.7 0.7 9.3 39.2 5.2 26.6 10 4.7 0.7 AS1001F-05D 3/16" AS1001F-06D 6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 6.2 27.7 AS1001F-07D 1/4" AS2001F-04D 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 11.8 7.2 1.2 AS2001F-06D 6 AS2001F-03D 5/32" 11.6 44.8 6.3 33

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Size Inch Size Model Model M1 d D1 D2 D3 L1 L2 L3 L4 d D1 D2 D3 L1 L2 L3 L4 M1 AS1001F-01T 1/8" 11.4 9.3 8.4 70.8 64.4 59 59.8 54.4 52.2 52.2 50 40.7 40.7 48.7 39.2 38 5.2 4.5 26.6 26 AS1001F-23T 3.2 20.9 18.5 20.9 18.5 15.2 12.8 15.2 12.8 11.6 9.3 11.6 9.3 8.4 76 71.6 64.4 59 59.8 53.2 44.8 40.7 40.7 39.2 38 9.8 8.2 7.4 8.1 6.7 6.3 5.2 6.2 5.2 4.5 56.4 55.4 48.5 47.3 45.8 45 36.5 35.2 33

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-33 33 Date issued: Photo copying this page is recommended.

Cylinder

le ' CP-FOO6 CP-F010 ,CP-F01 5 F00~ . CP-L006ICP-LOHi jCP-i:015 10 5, 10, 1 5, 20 ,(25)~ 30 Tluhnlmfwrth pi~): CP-T006Ic P-TOlO lCP-T015 15 5,1 0,15, 20, (25 )~ 30 ItI Smm spacer is added to the 30mm stroke cylinder.