CATALOG

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

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www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

Table of Contents

Series ASD * * * F-D Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting. Specifications. How to Order . Construction.

Table of Contents

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

VFR

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

PFxx-OMJ0005CN

L/min [F 2] 27 [ ] 3% [H_2] (OUT2) PFM7100.3 L/minPFM7250.8 L/min PFM7501.5 L/minPFM7113 L/min [F 3] [FLU] [Air] N2 28 [F 4] [rEF] [Anr] 29 [F 5] [rES] [1 . 00] 1 s 30 [F 6] [dSP] [inS] 31 [F 7] [inP] [r_r] 32 [F 8] [drE] [1E2] 100 35 [F 9] [PrS] [oFF] 36 [F10] [EEP] [oFF] OFF 38 [F11] [AFL] [ on] 39 [F12] [Eco] [oFF] 40 [F13] [Pin] [oFF] 41 [F98] [ALL] [oFF] 42 [F99]

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

Precision Regulator

M6 x P0.5 15.5 9 76 148 Bleed 43 EXH(3) OUT(2) SUP(1) 22 66 Rc 1/2 Exhaust port 68 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 Bottom bracket is not available as an option. 814 A Precision Regulator IR1000/2000/3000 Series Dimensions IR2120-02 IR3120-0 50 82 Mounting hole 36 Mounting hole 60 Bracket (Option) Bracket

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

IR1000/2000/3000

Mounting is possible on either the front or the back Expanded regulating pressure range The maximum set pressure has been expanded from the conventional 0.7MPa to 0.8MPa Compact and light weight IR1000 width 35mm weight 140g (previously unavailable small size added) IR2000 width 50mm weight 300g ( width 14%, weight 6% Compared to SMC IR200) IR3000 width 66mm weight 640g ( width 21%, weight 36%

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Body Option: 0 (Standard), Thread: F (PF), Style: 36 [Key Selector (2 Position)]

Body Option: Standard, Thread: PF, Style: 36 [Key Selector (2 Position)], Suffix: -, Accessory: -

EXxx-OMW0014CN

EX245-SPN1A SI FO LED 02dB FO LED 0dB (6.4.5 FO LED) (F01 EX245-SPN1A FO1: ON FO2: OFF 1 2 11 2 3SI EX245-SPN1A 34 No.EX-OMW0014CN-A 6. SI 6.1.

EXxx-OMU0020CN

SI SI FO LED Link Power Margin(02dBFO LED Link Power Margin 0dB(7.4.3 FO LED) F01 1Port1 Link Power Margin 2Link Power Margin 3SI EX245-SPN1Link Power Margin SF EX245-SPN1 FO1 FO2 Port Port Port1 Port2 43 No.EX-OMU0020CN 6. SI EX245-SPN1 6.1.

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 36 (Key Selector, 2 Position), Suffix: None, Indicator: None, Bracket: B (w/Bracket)