Micro Mechanical Valve Series VM1000

-34CY VM-36C Push button (Flush) VZM550-01-33 177 VH VZM550-01-34R Red Black VZM550-01-34B Twist selector (2 position) 178 VHS Green VZM550-01-34G Yellow VZM550-01-34Y Key selector (2 position) VZM550-01-36 VHS 197 170 Black Push-pull VZM550-01-37 Note 1) Actuator replacement is available for all types.

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

VM

selector (2 position) Black Green Yellow Key selector (2 position) VM-34CB VZM550-01-34B VM-34CG VZM550-01-34G VM-34CY VZM550-01-34Y VM-36C VZM550-01-36 Black Push-pull VZM550-01-37 Note) Actuator replacement is available for all styles.

Ozone Resistant

220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves

ZP

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

ZP

47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 Connection 1.6 thread 29 B D 6 15 10 94 40 43 15 99 45 25 109 55 63 37 02 1.2 Width across flats 12 A N S U F GN GS 6 63 37 15 10 94 40 43 15 99 45 25 109 55 N4 N6 U4 U6 J K ZP Y U 04 A8 1.6 Width across flats 7 6 63 37 15 10 94 40 43 15 99 45 25 109 55 06 08 2.5 F 17.5 Dimensions Per Vacuum Inlet C2 Model E F Fitting part

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7 E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85 37 48.5 78.5 27.5 M10 x 1.5 63 65 46 68 31.5

Table of Contents

A B C D E F G H J Bracket dimensions Bracket part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

ZP

47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Mechanical Valves Series NVM, NVFM, NVZNI

in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

IIIIIII

in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

A

27.5 M5X0.8 depth 5 NAV303DZ 87.5 20.5 38 76 132.5 36 24 48 18 43 2 82.5 NAV404D 42 37 M6X1 depth 6 NAV404DZ 99.5 10.5 12 98 147.5 47 32 52 18 57 3 D I M E N S I O N S E X A M P L E O F NAC3000 + S O F T S TA R T-U P VA LV E Safety Note 1.

PSxx-OML0002CN

MPa ZSE30A-50.5 kPa ZSE30AF50.0 kPa ISE30A0.050 MPa ZSE30A5.1 kPa ZSE30AF5.0 kPa ON OFF -24No.PS-OML0002CN-G [F 2] OUT2 30 [F 1]OUT1 OUT1 [F 3] 30 2.5 ms [F 4] 31 1000 [F 5] 32 [F 6] 34 0 [F 7] 35 OFF [F 8] 36 OFF [F90] 37 OFF [F97] 39 OFF [F98] 41 [F99] 43 OFF -25No.PS-OML0002CN-G [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE30AF ZSE30A ISE30A MPa 0.001 0.001 0.001 kPa 0.1

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats