SMC Corporation of America
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Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Left Flange Surface, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Effective area of the built-in back pressure check valve type is reduced approximately 20%. 55 Series SV D-sub Connector Manifold Electrical Wiring 10F/16F D-sub Connector Type (25 pins) 13 Common Common 12 25 Light/Surge voltage suppressor 24 SOL. B 11 Station 1 SOL. A Light/Surge voltage suppressor 15 SOL. B Station 2 SOL. A Light/Surge voltage suppressor 2 14 SOL. B Station 1 SOL.

Refer to Specific Product Precautions 2 on page 450. 399 Series SV Manifold Electrical Wiring 10F/16F D-sub Connector Type (25 pins) 13 Common Common 12 25 Light/Surge voltage suppressor 24 SOL.B 11 Station 11 SOL.A Light/Surge voltage suppressor 15 SOL.B Station 2 SOL.A Light/Surge voltage suppressor 2 14 SOL.B Station 1 SOL.A 1 Light/Surge voltage suppressor This circuit has double wiring

Refer to Precautions 2 on page 1-2-9. 1-2-67 64 Series SV Manifold Electrical Wiring 10F/16F D-sub Connector Type (25 pins) 13 Common Common 12 25 Light/Surge voltage suppressor 24 SOL.B 11 Station 11 SOL.A Light/Surge voltage suppressor 15 SOL.B Station 2 SOL.A Light/Surge voltage suppressor 2 14 SOL.B Station 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Please contact us for the latest version.sales@ocaire.com, SEAL,PNY-16F,FKM, ACTUATOR, (GT CODES)CYLINDER HARDWARE, 11, CYLINDER HARDWARE, 0.00652 lb

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

Bore size 20 25 32 40 50 63 80 100 NBR Wiper (R option) FKM Wiper (V option) SDB-8 SDB-8F SDB-10 SDB10F SDB-12 SDB12F SDB-16 SDB-16F SDB-20 SDB-20F SDB-20 SDB-20F SDB-25 SDB-25F SDB-30 SDB-30F Replacement parts: Seal kits Note) Rubber bumper Air cushion Bore size CG5NSR CG5NSV CG5ASR CG5ASV 20 25 32 40 50 CG5N20SR-PS CG5N20SV-PS CG5A20SR-PS CG5A20SV-PS CG5N25SR-PS CG5N25SV-PS CG5A25SR-PS

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.