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Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 2X   Part Code: 1   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: Z (w/Light & Surge

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/Light & Surge Voltage Suppressor

Look up from the 5Hz switching cycle to find the intersection with SUP=0.35MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 9l/min (ANR). 1 0 2 3 4 5 6 7 8 9 10 Cycle (Hz) Caution 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa

H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz

H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz

Clean room Assembled and double-packaged in clean-room environment Note) With 3/8" inlet/outlet tube: 1 to 12l * The values appearing in the above table are representative of use in a room temperature environment and with tap water. 3 Series PA3000 Performance Automatically operated type Air pilot actuation type * Solenoid valve switching cycle PA3313-m03: Flow rate characteristics (5Hz

Internal pilot: 1 to 5HZ and external pilot: 1 to 8Hz is reference. The charts on page 10 show the relation for the adjustment needle value and operation frequency. However, there is approx. 2Hz of variation depending on individuality. Operating conditions affect the operating frequency.

Standard Specifications Standard Specifications Type of seal Metal seal Rubber seal Fluid Air, Inert gas Air, Inert gas Max. operating pressure 100 psi (0.7MPa) High pressure type 113 psi (0.8MPa) Min. operating pressure 14 psi (0.1MPa) 21 psi (0.15MPa) Valve specifications Solenoid specifications Note 1) Note 1) Ambient and fluid temperature 14 to 122F 14 to 122F Max. operating frequency 20Hz 5Hz

Bore size 20 25 32 40 50 63 80 100 NBR Wiper (R option) FKM Wiper (V option) SDB-8 SDB-8F SDB-10 SDB10F SDB-12 SDB12F SDB-16 SDB-16F SDB-20 SDB-20F SDB-20 SDB-20F SDB-25 SDB-25F SDB-30 SDB-30F Replacement parts: Seal kits Note) Rubber bumper Air cushion Bore size CG5NSR CG5NSV CG5ASR CG5ASV 20 25 32 40 50 CG5N20SR-PS CG5N20SV-PS CG5A20SR-PS CG5A20SV-PS CG5N25SR-PS CG5N25SV-PS CG5A25SR-PS

38NO.ZK2-OM00801-B [F99] <> [F99] [ON] 5 [oFF] [F99] -39NO.ZK2-OM00801-B / ()/ 1 "Hi" 1 1 "Lo" 1 1 () 3.5%F.S "0" (1F.S.) 1 , [LoC]1 ( [LoC]) < -> 5 LoCUnL () / -40NO.ZK2-OM00801-B < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 42/ [UnL] [FAL] 3[LoC] -41NO.ZK2-OM00801-B [000] <> (41)(43) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -42NO.ZK2-OM00801-B B /ON/OFF H_3 P_1 H_3 100 H_3 P.25F

Refer to page 25F 2OUT2 setting for the setting of H_3. E.g.) In case of P_1-60 kPa, enter 45 to H_3. (The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.

Refer to page 25F 2OUT2 setting for the setting of H_3. E.g.) In case of P_1-60 kPa, enter 45 to H_3. (The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.