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Order the seal kit, based on each bore size. 8-19-21 Series MGP MGPM, MGPL: 12 to 25 4-YY depth YL XA depth 6 H7 T-slot dimensions b a XA H7 X 0.02 c d X XB e 3 XA H7 6 e 6.2 6.7 7.8 8.2 d 2 2.5 2.8 3 c 3.7 3.7 4.5 4.5 b 7.4 7.4 8.4 8.4 a 4.4 4.4 5.4 5.4 Bore size (mm) 12 16 20 25 Section XX Detailed figure of section XX WB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 63, Flange Type: D [K (DN)], Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)

Valve Type: Normally Closed, Bellows Seal, Flange Size: 63, Flange Type: D [K (DN)], Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard

CATALOG

1 325 (3.25) 1 1/8 3.9 1/2 0 1.57 1.18 2.76 1 3/8 2.34 2.72 1 1/2 1 1/2 3/8-24 3 3/4 4 1/4 5 53/64 3/4-16 7/8 1/2 1 400 (4) 4.7 1/2 0 1.57 1.18 3.32 2.34 2.72 1 1/8 1 1/2 1 1/2 3/8-24 4 1/2 1 3/8 4 1/4 5 53/64 3/4-16 7/8 1/2 D I M E N S I O N S F O O T M O U N T I N G T Y P E NC A1L + = Stroke addition E Y LF EE MM AA AB AT BA EA ZA AO J S G WF P SA BORE (INCH) KK A AH AL B C D DD F AE XA

Proposals for Energy Saving

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 59 71 82 46 55 66 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 4 5 5 16 16 16 12 15 15 44

MLGP

H7 depth XL IE XA H7 depth XL T-slot dimensions Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

MLGP

H7 depth XL IE XA H7 depth XL T-slot dimensions Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

1

** M9NAV** M9NA** v v V v v IC circuit 3-wire (PNP) M9PAV** M9PA** M9PAV** M9PA** v v V v v 2-wire 12 V M9BAV** M9BA** M9BAV** M9BA** v v V v v Grommet WRF Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V

Environment

H9 depth XA LEPY LEPS LER MH LEH MD MA MC ML + Stroke LEY -X5 LEY -X5 Section XX Section XX details 11LEFS XA H9 XA XB Note 1) Range within which the rod can move.

15

XA H9 XA LEC LEC S LEC SS-T Note 1) Do not allow collisions at either end of the rod operating range at a speed exceeding pushing speed.

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Smooth Cylinder/Low Speed Cylinder

Symbol Specifications Change of rod end shape Special port location Made of stainless steel -XA -XC3 Mounting bracket Description (when ordering a minimum number) Bore size (mm) Minimum order 20 25 32 40 -XC6 Axial foot -XC9 2 CM-L020B CM-L032B Foot 2 pcs., Mounting nut 1 pc.

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

ISO Cylinder

Rod end Symbol Specifications -XA Change of rod end shape -XB6 Heat resistant cylinder (10 to 150C)*1 * Mounting bracket, rod end, and auto switch are shipped together with the product.

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2 MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the attached bolt for unlocking (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.