Flange Size: 16, Flange Type: KF(NW), Port Direction: K (Left Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

IDX-OM-M051

(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K

High Vacuum Angle Valve

1 CE-compliant Q CE-compliant Nil 421 B XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa

XL

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

1 CE-compliant Q CE-compliant Nil 421 XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa)

XL-OMV0002

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14)

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Please contact SMC for details. 7 Aluminum High Vacuum Angle Valve XLC Series Specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLC 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] 1 x 106 to atmospheric pressure Conductance

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 9.84732 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.51874 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 3.08647 lb

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

IDX-OM-U021

0.151.0 / K 0.151.6 () 245 (85%) 50Hz 16 20.1 25 (ANR) 1) 60Hz 18.8 23.7 30 3/min m 50Hz 16.7 20.9 26 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 3) 10 (50/60Hz) kW 8.0/9.0 10.0/11.5 12.0/15.0 () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.9/3.5 4.0/4.7 4.0/4.8 (50/60Hz) (50/60Hz) A 10.5/11.5 15.4/15.6 15.7/16.0 5 ) A 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

IDX-OM-Z004

23.7 30 3/min 50Hz 16.7 20.9 26 m 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 10 3) 6) m 3/h 1.29 / 1.56 1.74 / 1.98 2.16 / 2.53 (50/60Hz) 32 7) MPa 0.070.1 (50/60Hz) 8) kW(RT) 9 (2) 11.5 (2.5) 14.5 (3.2) () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.4 / 2.8 2.8 / 3.3 (50/60Hz) (50/60Hz) A 8.5 / 9.0 10.2 / 11.5 5 ) A 20 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

This is a legacy product, and replaced byXLC-40-2 XLC HIGH VACCUM VALVE. HIGH VACUUM VALVE. VACUUM SERIES. XLC NO SIZE RATING. 2.89186 lb. 2X.