High Vacuum Angle Valve 1 CE-compliant Q CE-compliant Nil 421 B XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa
209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.
1 CE-compliant Q CE-compliant Nil 421 XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa)
-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14)
209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.
Please contact SMC for details. 7 Aluminum High Vacuum Angle Valve XLC Series Specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLC 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] 1 x 106 to atmospheric pressure Conductance
Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/
Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l
Flange Size: 25, Flange Type: KF(NW), Port Direction: Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Valve Type: Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Non-standard Indicator: -, Body Surface Treatment
Valve Type: Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification
Valve Type: Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface
Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The