Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Bellows Seal, Sonic Conductance: 14L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9B solid-state auto

Valve Type: Double Acting, Bellows Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment

Table of Contents

Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8

Modular F.R.L. Unit

Symbol Nil B Note 1) C D E G Note 2) P Applicable models AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K F Note 2) G Note 1) Drain guide: For NPT 1/4 (applicable to AW30K and 40K), the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30K and 40K).

Modular F.R.L. Unit

to 40K 8 Metal bowl with level gauge AW30K, 40K With back flow mechanism C With bowl guard AW20K J Note 5) Drain guide 1/4 AW30K, 40K Note) AW10 comes with a back flow mechanism as a standard feature.

Best Pneumatics Vol. 14

Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Applicable model AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K Port size Body size Symbol Port size 20 30 40 Float type auto drain (N.O.)

High Vacuum Angle Valve

1 CE-compliant Q CE-compliant Nil 421 B XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa

XL

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

1 CE-compliant Q CE-compliant Nil 421 XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa)

XL-OMV0002

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14)

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Please contact SMC for details. 7 Aluminum High Vacuum Angle Valve XLC Series Specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLC 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] 1 x 106 to atmospheric pressure Conductance

smcmaintenancepartslist

ARG20(K) AR20P-410S AR20P-150AS AR20P-050AS ARG20P-400S GB2-10AS ARG20P-420S AR20KP-020AS ARG20K, 30K, 40K Note Qty. No.

Flange Size: 25, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same

Flange Size: 25, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: F1

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IRV Direct operated precision regulator now available as a series!! (ARP20/30/40) VEX SRH SRP Applications Applications SRF a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR-A 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IR Direct operated precision regulator now available as a series!! (ARP20/30/40) IRV VEX SRH Applications Applications SRP a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

modular-press-e

ARG20(K) AR20P-410S AR20P-150AS AR20P-050AS ARG20P-400S GB2-10AS ARG20P-420S AR20KP-020AS ARG20K, 30K, 40K Note Qty. No.