Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)]

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: -, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Table of Contents

AH DAF 20MHSH3-32DB, 40DB Note) For dimensions, refer to the MHSH3-32 to 80D dimensions on page 12-7-39.

MHS

-25D MHSH3-25D M30.5 0.88 25D M30.5 0.88 MHSJ3-32D MHSH(J)3-32D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 MHSJ3-40D MHSH(J)3-40D M40.7 2.1 50D M50.8 4.3 MHSJ3-50D MHSH(J)3-50D M50.8 4.3 63D M50.8 4.3 MHS3 MHSJ3-63D MHSH(J)3-63D M61 7.3 MHSJ3-80D MHSH(J)3-80D M61 7.3 Nm MHS3-16D M30.5 0.88 20D M30.5 0.88 25D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 50D M50.8 4.3 63D M61 7.3 80D M61 7.3 MHSH(J)3

Compressed Air Preparation Filter

80D 14.5 90D Space-saving design, Reduced piping labor!

Air preparation filter

Assembly and replacement procedure Nominal No. of the tool Body size Bolt Auto drain Lock nut Nominal size Size Width across flats 70D 6 M8 24 80D 8 M10 90D 7-1. Bracket assembly A) Mount the bracket to the product. B) Mount a washer to the 2 mounting bolts respectively, and hold the bracket to the product. Tightening torque is 6.2Nm for 70D, and 12.5 Nm for 80D and 90D.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -,

A

MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

CATALOG

2 4H9 0~0.03 4 8 NOTE) FOR MHS2 AND MHS4 DIMENSIONS AND MORE TECHNICAL INFORMATION, REFER TO CAT:E246 MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

CA2

(Example) 40D-A3C-4 50D-A3C-5 63D-A3C-6 80D-A3C-8 100D-A3C-10 When other brackets are ordered separately, order by the above part numbers. Stainless steel mounting screw kit A set of stainless steel mounting screws (with set screws) described below is available and can be used as required by the operating environment.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.