Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Bellows Seal, Sonic Conductance: 14L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9N solid-state

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Non-standard Indicator: -, Body Surface

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Non-standard Indicator: -, Body Surface

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

75l x 80l x 85l x 120l x 145l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

75l x 80l x 85l x 120l x 145l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l

Hydraulic

Example: M8 x 80l 4 pcs.

Smooth Cylinder/Low Speed Cylinder

x 85L x 90L x 95L x 100L x 135L x 160L CQ-M10 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 140L x 165L CQ-M10 x 75L x 80L x 85L x 90L x 95L x100L x 105L x 110L x 115L x 150L x 175L 40 45 50 55 60 65 70 75 80 85 120 145 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 120L x 145L CQ-M5x

CQS

M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l x 45l x 50l x 55l x 60l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l 6.5 6.5 Head side mounting style Mounting bolt 6.5 6.5 Rod side mounting style 6.5 6.5 Mounting bolt 8.5 8.5 Note) When mounting

CHKD/CHKG

D C D D CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L x 185L x 210L CQ-M8 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 145L x 170L x 195L x 220L x 245L C Model Mounting bolt

CLQ

x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l x 175l 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Hydraulic Cylinders

Example: M8 x 80l 4 pcs.

Compact Hydraulic Cylinder

95 x 135L 135 -50D (M) -75D (M) x 100L 100 x 160L 160 DCHQB32-5D (M) -100D (M) CHQB80-10D (M) CQ-M5 x 70L 70 x 185L 185 -10D (M) CQ-M10 x 100L x 75L 75 100 -15D (M) -15D (M) x 80L 80 105 x 105L -20D (M) -20D (M) x 85L 85 110 x 110L -25D (M) -25D (M) x 90L 90 115 x 115L -30D (M) -30D (M) x 95L 95 120 x 120L 7 -35D (M) -35D (M) x 100L 100 14.5 125 x 125L -40D (M) -40D (M) x 105L 105 130 x

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L 10211122102111226.5 6.5 10211122102111226.5 6.5 10211122102111226.5 6.5 10211122102111228.5 8.5

Compact Hydraulic Cylinder Series CH
KGB

Example: M8 x 80l 4 pcs.

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Table of Contents

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

CQS

Mounting Bolt for CDQSW/With Auto Switch Mounting bolt M3 X 35l X 40l X 45l X 50l X 55l X 60l M3 X 35l X 40l X 45l X 50l X 55l X 60l M5 X 45l X 50l X 55l X 60l Mounting bolt M5 X 65l X 70l X 75l X 80l X 85l X 90l M5 X 45l X 50l X 55l X 60l X 65l X 70l X 75l X 80l X 85l X 90l Model C Model C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

x 85l x 90l x 95l x 100l 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32 5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D