Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Table of Contents

SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

Ejector Valve Unit Series ZYY/ZYX 1

SY3000 manifold model Ejector valve number SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum

V100

(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Manifold base) 10-SYJ7143-5LZ 1 pc. (Valve) 10-SYJ7243-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part no. of the solenoid valve, etc. 352 5 Port Solenoid Valve 10-SYJ7000 Note) CE-compliant: For DC only.

SYJ3000/5000/7000

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

4/5 Port Air Operated Valve Series SYJA3000

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Voltage: 100 VAC, Seal Type: Bellows Seal, Sonic Conductance

Ejector Valve Unit, Series ZYY/ZYX

SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

MVGQ

MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.