Aluminum High Vacuum Angle Valve

VMQ FKM for Plasma ULTIC ARMOR Example) XLD-25-M9NA-XAN1A U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 448 XLD/XLDV Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] G XLDV M9N A L 1 25 !

Series CE1

10%) (Power supply ripple: 1% or less) Power supply Foot Flange Bore size (mm) Double clevis 40mA Current consumption 12 20 32 40 50 63 CQ-L012 CQ-F012 CQ-D012 0.1mm/pulse Resolution CQ-L020 CQ-F020 CQ-D020 0.05mm Accuracy CQ-L032 CQ-F032 CQ-D032 Open collector (24V DC, 40mA) Output style CQ-L040 CQ-F040 CQ-D040 A/B phase difference output Output signal CQ-L050 CQ-F050 CQ-D050 500V DC, 50M

CLK1

Green LED lights up Indicator light Lead wire Oil resistant heavy duty vinyl cord, 6, 0.5mm, 2 wire (Brown, Blue [Red, Black]), 3m Impact resistance 1000m/s Insulation resistance 50M or more at 500VAC (between lead wire and case) Withstand voltage 1000VDC for 1 min.

Clamp Cylinder with Lock Series CLK1

Green LED lights up Indicator light Lead wire Oil resistant heavy duty vinyl cord, 6, 0.5mm, 2 wire (Brown, Blue [Red, Black]), 3m Impact resistance 1000m/s Insulation resistance 50M or more at 500VAC (between lead wire and case) Withstand voltage 1000VDC for 1 min.

MHF2

Example: When ordering with an air chuck Lead wire length symbol: 0.5mNil (Example) F9N 3mL (Example) F9NL 5mZ (Example) F9NWZ Auto switches marked "O" are produced upon receipt of order. Note 1) Be careful for the differential of 2-color display type. Refer to "Auto Switch Hysteresis" on page 22.

MIW/MIS

Electrical entry direction Applicable Electrical entry Indicator Type load Perpendicular F9N F9P F9B F9NV F8N F9PV F8P F9BV F8B 3-wire (NPN) 3-wire (PNP) Solid state (switch) Relay PLC 2-wire 12V Yes Grommet 24V 3-wire (NPN) 3-wire (PNP) F9NWV F9NW Diagnostic indication F9PWV F9PW (2-color display) F9BWV F9BW 2-wire Lead wire length symbols: 0.5mNil (Example) F9N 3mL (Example) F9NL 5mZ

Escapements Series MIW/MIS

Electrical entry direction Applicable Electrical entry Indicator Type load Perpendicular F9N F9P F9B F9NV F8N F9PV F8P F9BV F8B 3-wire (NPN) 3-wire (PNP) Solid state (switch) Relay PLC 2-wire 12V Yes Grommet 24V 3-wire (NPN) 3-wire (PNP) F9NWV F9NW Diagnostic indication F9PWV F9PW (2-color display) F9BWV F9BW 2-wire Lead wire length symbols: 0.5mNil (Example) F9N 3mL (Example) F9NL 5mZ

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

CJ2

C73C 5mZ e.g.)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

(Single solenoid part no.) 10-SZ3260-5MZ-C63 sets (Double solenoid part no.)

CL

12V 2 wire Connector MY1 5V, 12V 3 wire (NPN) Termina conduit 2 wire 12V Yes 3 wire (NPN) Relay, PLC IC 5V, 12V 24V Diagnostic indication (2 color) 3 wire (PNP) 2 wire 12V Water resistant (2 color) Grommet With timer 3 wire (NPN) IC With diagnostic output (2 color) 5V, 12V 4 wire (NPN) Latching with diagnostic output (2 color) H7LF Lead wire length symbol 0.5m (Example)C80C 5mZ

SZ3000

Pilot type Nil R Internal pilot External pilot How to Order Valve Manifold Assembly Ordering example (SZ3000, Non plug-in) Double solenoid (24 VDC) SZ3260-5MZ-C6 (3 sets) SUP/EXH block (U side mounting) Single solenoid (24 VDC) SZ3160-5MZ-C6 (2 sets) U side D side Stations3 2 1 SS5Z3-60-05U 1 set (Manifold part number) SZ3160-5MZ-C6 2 sets (Single solenoid part no.)

CQ2

With diagnostic output (2 color) F79F 4 wire (NPN) Latch with diagnostic output (2 color) F7LF Lead wire length 0.5m (Example) A80C 5mZ (Example) A80CZ 3m L (Example) A80CL None N (Example) A80CN Solid state switches marked with a are manufactured upon receipt of order.

MU

female thread F79W F7NWV 3 wire (NPN) 5V 12V IC 3 wire (PNP) F7PW Relay, PLC Diagnostic indicator ( 2 color) 24V Yes J79W F7BWV 2 wire 12V Rod end male thread M Water resistant (2 color) F7BA Grommet 3 wire (NPN) With timer F7NT 5V 12V IC With diagnostic output (2 color) Latch with diagnostic output (2 color) F79F 4wire (NPN) F7LF 0.5m (Example) 3mL A80C A80CL A80CZ A80CN 5mZ

MGP

Z80 No IC circuit 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P.5.3-40 2 wire 12V Y59B Y69B 3 wire (NPN) Solid state switch Relay PLC Grommet Yes 24V Y7NW Y7NWV IC circuit 5V 12V Diagnostic indication (2 color) 3 wire (PNP) P.5.3-48 Y7PW Y7PWV Y7BW Y7BWV 12V 2 wire Water resistant (2 color) Y7BAL P.5.3-63 PLC: Programmable Logic Controller *Lead wire 0.5m (Example) 3mL 5mZ

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: G

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: H

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L