XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3140-5G 3 sets (Single solenoid part no.) SY5140-5G 2 sets (Single solenoid part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-60-04U 1 set (Type 60, 4-station manifold base part no.) 10-SY3260-5G-C6 2 sets (Double solenoid part no.) 10-SY3160-5G-M5 2 sets (Single solenoid part no.)

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: G

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

SX

SX3240-5G 2 sets (Double solenoid part no.) SX3140-5G 2 sets (Single solenoid part no.) SY3000-26-9A 1 set (Blanking plate assembly part no.) One-touch fitting for 1/4" N7 One-touch fitting for 5/16" N9 SX5000 Type 42 (Common external pilot type) The asterisk denotes the symbol for assembly.

SY

SY3140-5G . 2 sets (Single solenoid part no.) SY3240-5G . 2 sets (Double solenoid part no.)

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

High Vacuum Angle Valve

O-ring seal High operating cycles (With solenoid valve) High-speed operation XLG Double acting O-ring seal High operating cycles High-speed operation XLGV Double acting O-ring seal High operating cycles (With solenoid valve) XLD For preventing dust turbulence Bellows seal Single acting (N.C.) mark: For preventing a pump from running overloaded XLDV O-ring seal Refer to the Web Catalog.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.