V100

(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Manifold base) 10-SYJ7143-5LZ 1 pc. (Valve) 10-SYJ7243-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part no. of the solenoid valve, etc. 352 5 Port Solenoid Valve 10-SYJ7000 Note) CE-compliant: For DC only.

SYJ3000/5000/7000

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

4/5 Port Air Operated Valve Series SYJA3000

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

Ejector Valve Unit, Series ZYY/ZYX

SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

MVGQ

MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VZ100/300/500

(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet. 34 Series SYJ5000 Flat Ribbon Cable Manifold Multiple valve wiring is simplified through the use of the flat cable connector.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

By combining the reference points of these two pieces of data, you will be able to see the CAD data of the SY5140-5LZ-02.