High Vacuum Angle Valve, XL Series

Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Flange size 16 25 40 50 Heater combination table Setting temperature Symbol Model XLH-16 XLH-25 XLH-40 XLH-50 80C (176F) H1 100C (212F) H2 120C (248F) H3 Note) Heater cannot

XL-OMY0003

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

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16 32 32 PROFINET M12 M12 16 16 PROFIBUS DP 32 32 EtherNet/IP M12 D-sub Note) 16 16 32 CC-Link M12 16 Note) Enclosure is IP40 when the communication connector is D-sub. eClamp bracket assembly Part no.

15

XA H9 XA LEC LEC S LEC SS-T Note 1) Do not allow collisions at either end of the rod operating range at a speed exceeding pushing speed.

Table of Contents

D20Sizes 10 and 16 updated!

Made to Order

to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

Battery-less

, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 JXCmF series All versions Blank Controller

Environment

H9 depth XA LEPY LEPS LER MH LEH MD MA MC ML + Stroke LEY -X5 LEY -X5 Section XX Section XX details 11LEFS XA H9 XA XB Note 1) Range within which the rod can move.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K X [mm] LEYGlM (Sliding bearing) [mm] LEYGlL (Ball bushing bearing) Size Stroke range (mm) L DB Size Stroke range [mm] L DB (0.5) Section XX 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 25 15 to 110 91 10 115 to 190 115 195 to 300 133 Z WB WA WC + Stroke 32 20 to 55 74 16 60 to 185 107 190 to 300

Table of Contents

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

CRB2/CRBU2/CRB1

Example: -XA1A24 XA, XC combinations Combination other than -XA, such as Made to Order (-XC), is also available. Refer to pages 31 and 32 for detailed description of Made to Order.

Possible to transfer a workpiece at low-speed.

Combination between -XA and -XA (S, W shaft) Top port Shaft type Upper Lower Applicable size Symbol Description Combination S W Female thread at the end Female thread at the end Tip end of male thread Tip end of male thread Stepped round shaft Stepped round shaft Round shaft with steps and male thread Round shaft with steps and male thread XA 1 XA 2 XA 3 XA 4 XA 5 XA 6 XA 7 XA 8 XA 9 XA10

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Description Applicable size 10 15 20 30 40 Symbol Shaft through-hole XA13 XA16 XA19 XA20 Shaft through-hole + Double shaft-end female thread Shortened shaft Reversed shaft D103 Series CRBU2 Combination XA Combination Symbol XA 1 XA 2 XA 3 XA 4 XA 5 XA 6 XA 7 XA 8 XA 9 XA10 XA11 XA12 XA13 XA14 XA15 XA16 XA17 XA18 XA19 XA20 XA21 XA22 XA23 XA24 Combination XA1 XA2 XA3 XA4 XA5 XA6 XA7 XA8 XA9

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, XC Combination Combination other than -XA, such as Made to Order (-XC), is also available.

Table of Contents

, XC Combination Combination other than -XA, such as Made to Order (-XC), is also available.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, XC Combination Combination other than -XA, such as Made to Order (-XC), is also available.

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NCA Stroke Range DSeries Bore size (mm) Standard stroke (mm) Long stroke (mm) MY1B 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 100 to 2000 2001 to 5000 (Up to 3000 for 10, 16) -X MY1M(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) MY1C(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) 20MY1H 16, 20, 25, 32, 40 50 to 600 601 to 1500 (Up to 1000

MG

7 Except 16 Except 16 Seal kit includes @3 to @8.

CNG

25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x