CQ2

Model C Mounting bolt Model C Mounting bolt D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 CDQ2B12-5S -10S CDQ2B16-5S -10S CDQ2B20-5S -10S CDQ2B25-5S -10S CDQ2B32-5S -10S CDQ2B40-5S -10S CDQ2B50-10S -20S CDQ2B12-5T -10T CDQ2B16-5T -10T CDQ2B20-5T -10T CDQ2B25-5T -10T CDQ2B32-5T -10T CDQ2B40-5T -10T CDQ2B50-10T -20T M3 X 35 l X 40 l M3 X 40 l X 45 l

Shock Absorbers and Rate Controls

8.6 14.0 29.0 I4.0 150.0 DA50l{lxE 51.0 t{.0 345.0 406.0 14.7 t.0 38.0 28.6 t4.0 29.0 14.0 200.0 DA75lllx50 76.0 19.0 245.0 348.0 19.4 86.0 51.0 38.0 21.0 38.0 I9.0 50.0 DA/51{lxl00 76.0 19.0 295.0 398.0 19.4 86.0 5t.0 38.0 21.0 38.0 19.0 100.0 DA75fxl50 7 6.0 19.0 345.0 448.0 19.4 86.0 5t.0 38.0 21.0 3E.0 t9.0 150.0 DA75llx200 76_0 19.0 395.0 498.0 19.4 86.0 5t.0 38.0 21.0 38.0 19.0 ?

CQS

L F G D Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm In the case of long strokes, use either ends tapped mounting or bracket mounting. Mounting brackets are shipped together, (but not assembled).

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

XL

Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)

High Vacuum Angle Valve, XL Series

Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)

Table of Contents

5 32 3 16 1 4 5 16 3 8 1 2 1 2 17.46 17.46 17.46 22.23 25.4 28.6 -18 -20 9 16 -18 9 16 3 4 7 8 1-12 -14 -16 Bulkhead Male Elbow: KQ2LE Applicable tubing Applicable tubing O.D.

Air Fittings & Tubing

32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.

KJ

9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference dimensions after R thread installation.

VQ5000

Mitsubishi: MELSECNET data link system (2 power supply systems) OMRON: SYSBUS wire system Sharp: Satellite I/O link system NKE: Simplified wiring system (16 point output) Sanks: S-LINK system (16 point output) Sanks: S-LINK system (8 point output) Fuji Electric: T link mini system S 2 to 9 (12) 1 station U side n DeviceNet, OMRON Compo Bus/D (2 power supply systems) OMRON: Compo Bus/S (16

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

32 16 By mounting individual EXH spacers on a manifold block, it is possible to provide individual exhaust ports for each valve.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A C B ) M-01AN-4 M-01AN-6 M-01AU-4 M-01AU-6 5 7 5 7 16 18 16 18 2.1 4.0 2.1 4.0 1.8 2.5 1.8 2.5 Nylon tube Soft tube Hose nipple: M-01H-4, -6 Effective orifice(mm2 Weight (g) ) Part No.

CATALOG

2.36 1 15/16 9/32 2 1/4 4 3/4 9/16 3/8 5/8 1 1/4 7/16-20 1 1/8 1 1/8 5/16-24 5/16-18 200 (2) 3/4 2.6 3/8 2 1/2 0.3 1.26 1.06 1 1.71 5/8 3 5/8 2.4 1 15/16 7/16 2 1/4 4 3/4 9/16 3/8 7/8 1 1/2 7/16-20 1 1/8 1 1/8 5/16-24 3 3/8-16 1 1/4 250 (2.5) 3/4 3.1 3/8 0 1.3 1.06 1 1.75 5/8 3 3/4 2.48 1 15/16 19/32 2 3/8 4 7/8 9/16 3/8 1 7/8 325 (3.25) 1 1/8 3.9 1 1/2 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1.18

F

KQH01-33S 11.11 22 18 15.5 2.5 7 3.2 1/4 KQH23-02S 14 21 15 15.5 3.4 2.9 16 1/8 1/8 KQH01-34S 11.11 22 18 15.5 2.5 9 4 M5x0.8 KQH04-M5 9.8 23.5 20 16 4 4 8 1/8 1/4 KQH01-35S 14.29 21 15 16 2.5 16 4 1/8 KQH04-01S 10 22 18 16 5.6 5.6 9 5/32 UNF10-32 KQH03-32 9.8 22.5 20 16 2.5 5 4 1/4 KQH04-02S 14 21 15 16 5.6 5.6 16 5/32 1/16 KQH03-33S 11.11 22 18 16 3 7 6 M5x0.8 KQH06-M5 11.8 24 20.5 17

Series SV

Tie-rod base A 34 pin connector allows up to 16 stations with double solenoids.

SV

to 16 solenoids possible.)

Table of Contents

Note 1) (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

AC

16 16 16 23 26 26 33 36 40 40 40 16 16 20 10 12.5 9.5 14.5 14.5 14.5 38.5 50 70.5 70.5 88 88 115 117.5 117.5 90.5 126.5 AC1020 AC2020 AC2520 AC3020 AC4020 AC4020-06 AC5020 AC5520 AC6020 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 181 191 225.5 230.5 309.5 323.5 323.5 Option For piping adapter AC2520, 3020, port size 1/2: 40mm For AC4020, port size 3/4: 50mm Metal bowl with level

Mechanical Valves Series NVM, NVFM, NVZNI

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s