Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Port Direction: w/Indicator, Flange Side; w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: A [2 pcs (Valve Open/Closed)], Seal Material: -, Seal Replacement: -

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Port Direction: w/Indicator, Flange Side; w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve Open/Closed)],

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: H0 (5 to 150°C)

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XMA/XMD/XMH/XMC HIGH VAC VALVE, 1X, XM* OTHER SIZE RATING, 1.17579 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Port Direction: w/Indicator, Flange Side; w/Indicator, Rear Flange Surface, Temperature: 5 to 150°C, Suffix: -, Auto Switch: -, Lead Wire: -, Number: -, Seal Material: -, Seal Replacement: -

S.S. High Vacuum Angle/In-Line Valve, HIGH VACUUM VALVE, L49, 0.33000 lb

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

Part Number Description: XM* OTHER SIZE RATING    Product Line: Z   Product Line Description: VACUUM SERIES    Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X    Click here to report information errorImage shown may not match exact part number, XM* OTHER SIZE RATING, VACUUM SERIES, XMA/XMD/XMH/XMC

Part Number Description: XM* OTHER SIZE RATING    Product Line: Z   Product Line Description: VACUUM SERIES    Family Code: 690   Family Description: XMA/XMD/XMH/XMC HIGH VAC VALVE   Class Code: 1X    Click here to report information errorImage shown may not match exact part number, XM* OTHER SIZE RATING, VACUUM SERIES, XMA/XMD/XMH/XMC

Table of Contents

Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !

1

Valve mounting screw falling-out-prevention type EX600 Series Standard (Valve mounting screw not falling-out-prevention type) VM SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY70V-16A-1 SY70V-16AR-1 SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY70V-16A SY70V-16AR Internal pilot External pilot Internal pilot External pilot Internal pilot External pilot SY3000 XT34 SY5000 SY7000 The part

MY1

Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !

smcmaintenancepartslist

MY3A16-16A-st MY3A20-16A-st MY3A25-16A-st MY3A32-16A-st MY3A40-16A-st MY3A50-16A-st MY3A63-16A-st MY3B16-16A-st MY3B20-16A-st MY3B25-16A-st MY3B32-16A-st MY3B40-16A-st MY3B50-16A-st MY3B63-16A-st st + 206 st + 225 st + 246 st + 289 st + 336 st + 370 st + 416 st + 218 st + 245 st + 274 st + 321 st + 372 st + 406 st + 452 MY3A MY3B (Note 1) Refer to Dust Seal Band Replacement Procedure for

Air Slide Table

For details, refer to page 126. 34 MXQA Series Dimensions: MXQ 16A [Standard] MXQ 16A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

MY1

Special resin Stainless steel 15 1 MY40-16A-Stroke MY50-16A-Stroke MY25-16A-Stroke MY63-16A-Stroke Seal belt MY20-16A-Stroke MY32-16A-Stroke MY16-16A-Stroke Note) 1 MY40-16B-Stroke MY50-16B-Stroke MY25-16B-Stroke MY63-16B-Stroke Dust seal band MY20-16B-Stroke MY32-16B-Stroke MY16-16B-Stroke 16 27 31 32 33 34 48 Scraper Piston seal Cushion seal Tube gasket O-ring O-ring NBR NBR NBR NBR NBR

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 SY3000 SY3000-39-2A(-Q) SY5000 SY5000-39-16A(-Q) SY7000 SY7000-39-16A(-Q) Series Assembly part no.

2

16 44.7 24.1 15.6 41.5 32.8 7.5 6 12 16 KQ2R12-16A 18.5 45.7 25.1 17 58.3 46.1 9 7 Note) D is maximum diameter.

Made to Order

Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with