Cylinder with Lock

D H11 E FB L4 MF R TF TG 0.2 UF Screw size 32 F5032 30 50 7 5 10 32 64 32.5 79 M6 x 20L 40 F5040 35 55 9 5 10 36 72 38 90 M6 x 20L 50 F5050 40 70 9 6.5 12 45 90 46.5 110 M8 x 20L 63 F5063 45 80 9 6.5 12 50 100 56.5 120 M8 x 20L 80 F5080 45 100 12 9 16 63 126 72 153 M10 x 25L 100 F5100 55 120 14 9 16 75 150 89 178 M10 x 25L D TG R E FB * Supplied with 4 mounting screws UF TF TG MF Single clevis

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

V V V v v K59 V V v v Terminal conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA

Valve Type: XMC (Angle Type, Double Acting, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)]

Valve Type: Angle Type, Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: A [2 pcs (Valve Open/Closed)], Seal Material: -, Seal Replacement

XM, XY

XMC-16-M9NA-XN1A Produced by Mitsubishi Cable Industries, Ltd. 484 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Specifications XMC-16 XMC-25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Model Flange (Valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Double acting (Dual operation), pressurize to open/close Fluid Inactive gas under vacuum Operating

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 25l 4 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 25l 4 pcs.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMC-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 4 Series XMC, XYC Stainless steel High Vacuum Angle/In-line Valve Specifications XMC-16 XMC-25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Double acting (Dual operation), pressurize to open/close Fluid Inactive gas under vacuum Operating

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

Wedge Cam Operation Provides

MHY2 MHW2 MRHQ Limitations of Holding Point Auto switch MHK2-12l MHKL2-12l MHK2-16l MHKL2-16l MHK2-20l MHKL2-20l MHK2-25l MHKL2-25l 120 60 100 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 100 50 50 Pressure 0.2MPa 80 Pressure 0.2MPa 40 40 80 Pressure 0.2MPa Pressure 0.2MPa 60 30 30 60 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa

CNA

Dd9 3 x 18l 0.040 0.076 10 40 50 63 80 100 CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40, 50, 63 80 100 Polished round 10 3 4 46 38 3 x 18l 0.050 0.093 12 Polished round 12 3 4 55.5 47.5 4 x 25l 0.050 0.093 16 Polished round 16 4 5 71 61 4 x 25l 0.050 0.093 18 Polished round 18 4 5 76.5 66.5 m l 4 x 25l 0.065 0.117 20 Polished round 20 4 5 83 73 L 4 x 36l 0.065 0.117 25 Polished round

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

CNA

Dd9 3 x 18l 0.040 0.076 10 CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40 50 63 80 100 40, 50, 63 80 100 Polished round 10 3 4 46 38 3 x 18l 0.050 0.093 12 Polished round 12 3 4 55.5 47.5 4 x 25l 0.050 0.093 16 Polished round 16 4 5 71 61 4 x 25l 0.050 0.093 18 Polished round 18 4 5 76.5 66.5 m l 4 x 25l 0.065 0.117 20 Polished round 20 4 5 83 73 L 4 x 36l 0.065 0.117 25 Polished round

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

CATALOG

ISE4L-01-25L ISE4-01-25L PNP Output ZSE4-01-65L ISE4L-01-65L ISE4-01-65L Analog Output ZSE4-01-26L ISE4L-01-26L ISE4-01-26L Operating Pressure Range +10 to -101KPa (1.5~15PSI) -0.1~1 Bar (-1.5~15PSI) -1~10 Bar (-1.5~145PSI) Minimum Displayed Unit mmHG: 5 kgf/cm2 = 0.01 kgf/cm2 = 0.1 PSI: 0.1 PSI: 0.1 PSI: 1 Bar: 0.01 Bar: 0.01 Bar: 0.1 kPa: 1 kPa: 1 MPa: 0.01 Switch Indicator ON (green light

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: CF, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9P solid-state auto

Valve Type: XMC (Angle Type, Double Acting, Bellows Seal), Flange Size: 40, Flange Type: C (CF), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9P--Solid State, Gen.

Valve Type: XMC (Angle Type, Double Acting, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9P--Solid State, Gen.