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2

Applicable thread Gasket M-5G2 10-32UNF Brass Description Part no.

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

SX

For 12 VDC, suffix -12V to the parts no. (Example) SX3000-64-1A-12V Manifold Block Assembly Part No. Style of manifold Wiring specifications Double Single Double Single Double Single Manifold block assembly part no.

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

V100

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VZ5140-5G2 pcs. (Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

1

This is for reference. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3

Table of Contents

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G Available only for white color body.

KJ

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G Available only for white color body.

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Faston Terminal, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: 90°, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -