Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 06 (One-touch Fitting ø6), VAC: 06 (One-touch Fitting ø6), EXH: 06 (One-touch Fitting ø6), Accessories: NS (w/o Standard Bracket, w/Silencer)

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 27, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø6, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø6, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

VM

VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust center) Rc 3/8: 49 Rc 1/2: 55 VH402-02 to 06 VH412-02 to 06 2 (Position) 1/4 to 3/4 2 1 1.28 VH4 Handle Operation Angle and Air Flow Direction VH420-02 to 06 VH430-02 to 06 3 (Closed center) (Refer to the figures of piping direction to the right.)

VM

JIS Symbol 2 port Roller plunger VM122-M5-06 VM132-M5-06 VM122-M5-06S VM132-M5-06S Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port 0.5 MPa supply R port (3 port only) 2-M5 x 0.8 depth 4 T.T. O.T. P.T.

Micro Mechanical Valve Series VM1000

Alternate type, Mushroom push button Push-lock turn-reset type, Mushroom push button X207 X219 Suffix for actuator R S G B Red Hard steel roller Actuator type Basic 00 Color of push button selector Port size Black Roller lever 01 01 1 8 Rc NPT G Green One way roller lever 02 1 8 N01 F01 Y Yellow Straight plunger 05 Roller plunger 06 1 8 Cross roller plunger 07 Toggle lever 08 Number of ports

Table of Contents

-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2

Tamper Proof and Flat Head Screw

How to Order 1F 06 D 200 AS Flow direction symbol on body Flat head screw driver adjustable type Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Metric sizes 23 04 06 08 10 12 Inch sizes 1/4 standard 3.2 01 03 05 07 09 11 13 1/8 3/8 standard 4 5/32 1/2 standard 6 3/16 8 1/4 10 5/16 With One-touch fitting 12 3/8 1/2 Use 1/8 tubing.

Table of Contents

03 04 06 q Description No.

VFR

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75 2 How to Order AS 2 2 1 1 F 01 06

1

M1 05 06 N5 N6 No pressure gauge Pressure gauge with MPa display (For odd number station) Pressure gauge with MPa display (For even number station) Note 2) Pressure gauge with psi display (For odd number station) Note 2) Pressure gauge with psi display (For even number station) SY 0M P 00 5 Series 5 7 SY5000 SY7000 Regulating port Part numbers of mounting screw (For repairs) SY3000: SY3000

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

Vacuum System Peripherals:

ZZX1 06 Manifold base Supply port location Stations Thread of supply and exhaust valve Right side Left side Both sides R L B 01 1 ZX Note) Exhaust port is both sides release type. ... ...

Process Pump

Note 2) When compressor discharge oil mist concentration is 30 mg/m3 (ANR). 11 Related Products Series PB Filter Regulator + Mist Separator Air Combination Model Specifications Model AC20D AC30D AC40D AC40D-06 AC20D AC30D AC40D-06 AC40D Model 1.5 MPa 1.0 MPa Proof pressure Series AC20D/30D/40D Filter regulator Component devices AW20 AW30 AW40 AW40-06 Max. operating pressure 0.05 to 0.85 MPa

Nozzle Diameter: ø0.7mm, Vacuum Pressure: -90 kPa, SUP: Screw-in G1/8, VAC: Screw-in G1/8, EXH: Screw-in G1/8, Accessories: -

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)