Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: Rc1/4, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: Rc1/8, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C): -5～50, Suction

Lightweight, point-of-use ZH and ZU series vacuum generators combine design simplicity with high performance. Simply plug an air supply tube in one end, and vacuum is ready at the other end. The slim ZU generators are extra compact. The ZH and ZU immediate response may be quicker than central vacuum systems. Also, these generators are often smaller and lighter than the bulky vacuum lines

Table of Contents

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Micro Mechanical Valve Series VM1000

Model Applicable tubing Number of ports Piping Weight (g) Note T0425 TU0425/T0403 3 port 2 port Actuator VM1000-4N-00 VM1100-4N-00 VM1010-4N-00 VM1110-4N-00 VM1000-4N-01 VM1100-4N-01 VM1010-4N-01 VM1110-4N-01 VM1000-4N-02 VM1100-4N-02 VM1010-4N-02 VM1110-4N-02 VM1000-4N-08 VM1100-4N-08 VM1010-4N-08 VM1110-4N-08 VM1000-4N-32R VM1100-4N-32R VM1010-4N-32R VM1110-4N-32R VM1000-4N-32B VM1100-4N

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

2

Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 INDEX 474 Series AS-FG Needle Valve/Flow-rate Characteristics AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

VM

Roller Lever/VM220-02-01, VM230-02-01 VM220-02-01S, VM230-02-01S JIS Symbol 2 port 3 port 24N F.O.F. 0.5MPa supply 6.5mm P.T. 4.5mm O.T. 11mm T.T. One Way Roller Lever/VM220-02-02, VM230-02-02 VM220-02-02S, VM230-02-02S JIS Symbol 2 port 3 port 22N F.O.F. 0.5MPa supply 7mm P.T. 5mm O.T. 12mm T.T.

AC

(01) Y31-02 (01) Y41-03 (02) Y51-03 (02) T type interface (3) Pressure switch VHS2000-01 02 02 03 VHS302 03 VHS3000VHS402 03 04 Y24-01 02 Y34-01 02 Y34-03 02 Y44-02 03 Y54-03 04 Residual pressure exhaust 3 port valve Cross interface Y30 Y40 Y50 B210T B310T B310T B410T B510T T type brcket Y20 Y30 Interface G46-10-02 G36-10-01 G36-10-01 G36-2-01 G36-10-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02

CATALOG

1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14

V100

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

Table of Contents

Y300 Y400 Y500 Spacer (5) (6) 01 (02) AKM2000(01) 02 AKM4000(02) 03 AKM3000Check valve (6) IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 Pressure switch 01 (02) Y210(01) 02 Y410(02) 03 Y510Y310(02) 03 Y110-M5 (5) (6) T-interface Attachment 02 03 04 (6) VHS40-06 01 02 VHS20VHS30VHS4002 03 Residual pressure relief 3 port valve 02 03 04 06 E500-06 02 03 04 E200E30001 02 03 (6) E400Piping adapter

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Table of Contents

VX2122-01 VX2132-01 VX2112-02 VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) Note 3) Float type auto drain Spacer Pressure switch Note 5) Note 4) Note 5) T-interface Y21001 (02) Y310(01) 02 Y310(01) 02 Y410(02) 03 Y510(02) 03 Note 5) 02 03 04 01 02 VHS302 03 VHS2000VHS302 03 VHS40003-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E200E400E500-06 Note 5) Piping adapter Note 5) 01