V100

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Port) (42.9 ) (20.0) (15) (5) (7.5) 5.0 n-M5x0.8 P=10 15.0 *Dimensions 9 122 171 191 225 235.5 n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 101 121 150 160.5 3 62 111 131 162.5 173 4 72 121 141 175 185.5 5 82 131 151 175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275

3 Port Solenoid Valve Series VQ100 1

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

VQ

35.1 32.4 H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 Latching 16.4 12.5 VG 7.5 100V AC or more 12.9 P=10 n-M5 A port VP Equation: L1=10n+13 L2=10n+7 n: Station (Max. 20 stations) Dimenshions n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 103 97 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 VQ

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

CATALOG

*Dimensions to BS5409 Part 1 D I M E N S I O N S KM11 Dimensions in mm Port B min Port Size Model (Metric Size) FA FB N L1 L2 L3 L4 L5 L6 P Q1 Q2 MA MB Mass (g) KM11-04-08-6 6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102 73 44 KM11-08-12-6 6 85 55 44 8 12 11.5 22.5 35.5

A

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10)

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 113, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø10, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 03 (Screw-in Rc 3/8), EXH: 10 (One-touch Fitting ø10)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: S (w/Standard Bracket, w/Silencer)

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 113, Vacuum Port Connecting Port Shape: Rc3/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 113, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø10, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MGP

75mm stroke V = 200mm/s 20 20 25 10 10 25 Load weight m (kg) Load weight m (kg) 20 20 5 5 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 7 25mm stroke V = 200mm/s 8 Over 25mm stroke V = 200mm/s 100 100 63 63 50 50 50 50 Load weight m (kg) Load weight m (kg) 40 40 32 32 10 10 5 10 50 100 200 5 10 50 100 200 Eccentric distance l (mm)

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.