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Suction Flow Air Consumption Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-contact NZM05H 5Kgf/cm2 / 75PSI 630mmHg 18 12 NZM07H 5Kgf/cm2 / 75PSI 630mmHg 24 23 NZM10H 5Kgf/cm2 / 75PSI 630mmHg 36 46 NZM13H 5Kgf/cm2 / 75PSI 630mmHg 40 95 NZM07M 3.5Kgf/cm2 / 50PSI 630mmHg 20 16 NZM10M 3.5Kgf/cm2 / 50PSI 630mmHg 26 32 NZM13M 3.5Kgf/cm2 / 50PSI 630mmHg 36 70 Courtesy

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Suction Flow Air Consumption Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-contact NZM05H 5Kgf/cm2 / 75PSI 630mmHg 18 12 NZM07H 5Kgf/cm2 / 75PSI 630mmHg 24 23 NZM10H 5Kgf/cm2 / 75PSI 630mmHg 36 46 NZM13H 5Kgf/cm2 / 75PSI 630mmHg 40 95 NZM07M 3.5Kgf/cm2 / 50PSI 630mmHg 20 16 NZM10M 3.5Kgf/cm2 / 50PSI 630mmHg 26 32 NZM13M 3.5Kgf/cm2 / 50PSI 630mmHg 36 70 Courtesy

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual

Main Body Shape: Square Shape, Additional Function: Filter / Valves for Vacuum Generation / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 90, Vacuum Port Connecting Port Shape: Rc1/8, Air Supply Port Connecting Shape: Rc1/8, Application: Manifolds, Operating Pressure Range(MPa): null～0.7, Operating Temperature Range(°C): 5:50～, Suction Flow(l/min):

This is a legacy product, and replaced byZM103HT-K5LZB, VACUUM GENERATOR, VACUUM SERIES, ZM VACUUM SYSTEM, CD, ZM NOZZLE SIZE 1.0, .58642 lb, ModelStandard Supply PressureMax. Vacuum PressureMax. Suction FlowAir ConsumptionNZM10?H5Kgf/cm2 / 75PSI?630mmHg3646

Table of Contents

ZM133H-J5LZ (3 pcs.) 13-4-14 14 Series ZM Vacuum Ejector: With Valve and Switch Manifold ZZM Number of ejectors Common EXH port Port location Mounting hole ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 ZL ZY ZQ ZF ZP Common SUP port 2

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZM133H-J5LZ (3 pcs.) 13-4-14 14 Series ZM Vacuum Ejector: With Valve and Switch Manifold ZZM Number of ejectors Common EXH port Port location Mounting hole ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 ZL ZY ZQ ZF ZP Common SUP port 2

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: J (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: Non-locking

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: J (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch

Main Body Shape: Square Shape, Additional Function: Filter / Valves for Vacuum Generation / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 90, Vacuum Port Connecting Port Shape: Rc1/8, Air Supply Port Connecting Shape: Rc1/8, Application: Manifolds, Operating Pressure Range(MPa): null～0.7, Operating Temperature Range(°C): 5:50～, Suction Flow(l/min):

Nozzle Diameter: ø1.3, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Vacuum

Nozzle Diameter: ø1.3, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 110VAC 50/60Hz, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum

Nozzle Diameter: ø1.3, Body Style: Manifold w/Common SUP Valve, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch Model: 1 Output