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81 g 85 g 43 g C3602 (electroless nickel plating) O-ring: HNBR Piping port Including lead wire with connector (3 cores, 2 m) 70 g 74 g 32 g 71 g 75 g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g Weight Including lead wire with connector (4 cores, 2 m) Excluding lead wire with connector Option/Part No.

G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

SY30M-11-1A SY50M-11-1A SY70M-11-1A Cable length: 300 mm Cable weight: Approx.18 g ZS-37-L w Cable length: 500 mm Cable weight: Approx.23 g ZS-37-M M12 waterproof connector cable e Cable length: 1000 mm Cable weight: Approx.36 g ZS-37-N Cable length: 2000 mm Cable weight: Approx.62 g ZS-37-P e Cable length: 5000 mm Cable weight: Approx.140 g ZS-37-C Tightening torque Caution M2: 0.16 Nm (

connector EXH port EXH port End plate L End plate L End plate R ZSE40 ISE40 3 0 3 0 3 0 ZSE10 ISE10 92 21 92 21 P P P T T T U U U E E E L L L S S S L L L 5.5 81 5.5 81 6 9 6 9 6 9 Setting dial ISE70 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 ZSE80 ISE80 12 12 12 Bracket ZSE ISE Plug Rc, NPT, G 1/8 SUP port 24 Pressure gauge L3 6.5 ZSP 24 36 36 PS n Stations 1 Left

Benzene/Toluene u to g u u to g Alcohol g g to Ether u to g u to g u u to g Ketone (MEK) v u u Ethyl acetate u to g g u to g u Water v g Alkaline resistance Acid resistance Organic acid u to g v u g to v Organic acid of high concentration g to v g u Organic acid of low concentration v v g Strong alkali v u v Weak alkali v u v = Excellent --Not affected at all, or almost no effect v = Good

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 150.5 60 64 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

29.5 40.3 58.1 4.5 2.3 Deep Deep Model A B C D E F Y G G H: M6 x 1 H: M8 x 1.25 H: M5 x 0.8 H: M6 x 1 H: M8 x 1.25 Model A B C D E F Y G G G ZPR40D 40 43 29 42.5 53.3 71.1 6 8 17 ZPR25D 25 28 20 35 45.8 63.6 5 6 8 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

EPR 13-11-91 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4 x 0.7 45 Width across flats 24 3-M3 x 0.5 28 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B D B D Dimensions Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model Model ZPX40HB-B01

6 08 8 G Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

T T 600 .75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G 2.8 (63) 1.50 (38) 0.94 (241 0.63 {16) 0.16 (4) 0.57 14.5) 0.24 (6) 2.66 (67.5) 1.67 42.5) 0.94 (241 0.63 (16) 0.20 (5) 0.57 14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM Nvtrll20-N01-32 130-N01-32 NVM120-N01-30 130-N01-30 4 63 lbs (2 1 ks.) r U T 4 6 3 l b s ( 2 1 k 9 )

T T 600 .75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G 2.8 (63) 1.50 (38) 0.94 (241 0.63 {16) 0.16 (4) 0.57 14.5) 0.24 (6) 2.66 (67.5) 1.67 42.5) 0.94 (241 0.63 (16) 0.20 (5) 0.57 14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM Nvtrll20-N01-32 130-N01-32 NVM120-N01-30 130-N01-30 4 63 lbs (2 1 ks.) r U T 4 6 3 l b s ( 2 1 k 9

www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E