SMC Corporation of America
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Search Results "ZSE20C-S-M-02L-W"

(F)/ISE20C(H) Series IP65 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order How to Order Rated pressure range ISE20C 0.1 to 1 MPa ISE20CH 0.1 to 2 MPa M For positive pressure ISE20C 02 X For vacuum/ compound pressure ZSE20C X M 02 q w e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the

(F) only) 6: mmHg (ZSE20C(F) only) ISE20C-L(-M): 0 ISE20C-L-P: 4 ZSE20C-L(-M): 1 ZSE20C-L-P: 4 ZSE20CF-L(-M): 1 Unit (Selection of display unit) 0x03E8 (1000) 0 R/W Y U8 ZSE20CF-L-P: 4 ISE20CH-L(-M): 0 ISE20CH-L-P: 4 NorP (Selection of PNP/NPN) Setting of switch output specification 0: NPN 1: PNP 0x03E9 (1001) 0 R/W Y U8 0x01 (1) Setting of display color 0: red (Constantly red) 1: Grn (Constantly

10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E

Panel fitting dimensions Drain Y A W W IN OUT IN OUT Z Plate thickness AW20(K)-B: Max. 3.5 Plate thickness AW10-A: Max. 3.5 AW60(K)-B AW30(K)-B to AW40(K)-06-B Bracket (Option) N T J M D U T N S U D M J S C R Bracket (Option) F R C B Q Q V K K IN OUT IN OUT 2 x P1 (Port size) P2 (Pressure gauge port size) B E Clearance for maintenance G Drain Panel fitting dimensions A Y W P2 2 x P1 (Port

0.1 Straight Type with One-touch Fitting KK2m-mH 3.2 KQ2C-01A-m 7.35 4.2 2.5 0.1 S Couplers KK2m-mH KK2m-mE 4 KQ2C-04A-m 8.5 5 2.2 0.1 Bulkhead Type with One-touch Fitting KK2m-mE 6 KQ2C-06A-m 10.5 7 2.2 0.1 KK2m-23L 3.2 KQ2C-01B-m 8.8 4.2 2.5 0.1 Elbow Type with One-touch Fitting KK2m-04L 4 KQ2C-04B-m 9.7 5 2.2 0.1 S Couplers KK2m-06L 6 KQ2C-06B-m 12 7 2.2 0.1 KK3 4 KQ2C-04m 10.1 5.2 2.9

Refer to the electrical power waveform to the left. 0.1 w 0.1 w 0.35 w 0.35 w With power saving circuit 0 V 0.4 (0.95) W With power saving circuit 0.1 (0.4) W Only products with an indicator light are equipped with the power saving circuit.

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R ZS-33-F S Stations ZS-33-D S 1 2 3 4 5 ZS-33-D 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Coil rating Number of solenoids 100VAC 200VAC 24VDC 12VDC Other voltage 1 2 3 4 9 S D Single Double Contact SMC regarding other voltages.

Accuracy may vary by 2 to 3% if the customer removes or replaces the piping port. -9No.PF-OMO0005-F Model Indication and How to Order -10No.PF-OMO0005-F Option1 NIL W N With lead wire with connector (2 m) With lead wire with connector (2 m) No lead wire + Connector cover (Silicone rubber) Option 2 NIL R S No bracket With bracket With bracket (Without flow adjustment valve) (With flow adjustment

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1/4)DIN -12No.PF-OMJ0005CN-I LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1

Accuracy may vary by 2 to 3% if the customer removes or replaces the piping port. -9No.PF-OMJ0006-J Model Indication and How to Order -10No.PF-OMJ0006-J Option1 Nil W Z with lead wire and connector (2 m) with lead wire and connector (2 m) without lead wire + Connecter cover (silicone rubber) Option2 Nil R S without bracket with bracket with bracket (without flow adjustment valve) (with flow

7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C