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:..1 : 4 0 0 . 1 > -90 . : : , ' : r ' ] t r , , l L : l l . l l P N 1 N E G c o P 1 2 Maximum number ot stations 20 Also available SY manifold with gateway type Sl unit and is capable to handle 128 UO points.

5-Port Solenoid Valve

Sl 111 Nil Direct mounting D DIN rail mounting (With DIN rail) D0 DIN rail mounting (Without DIN rail) Serial transmission S6l EX600 123 SAm EX245 124-1 Sl EX250 131 Sl EX260 139 S4l*1 EX126 147 S3l*1 EX120 155 S8m EX180 156-1 r Valve stations D3 For 3 stations Specify a length longer than that of the standard rail.

Series AP500

Ports 2 ports 3 ports 4 ports Code 2PW 3PW 4PW Porting Configuration r r e 1) Refer to gauge guide (P.94) for gauge specifications. Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

AZ1000

Unit psig/bar MPa Code r e No code MPA Sample Order Number Port qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q AZ1402TS e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 3) Pressure gauge unit MPa or psig/bar selectable.

Vacuum

Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Vacuum

enie MffiIE Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Stations: 1 Station, Port Thread: Rc, Exhaust Port: Silencer for ZZM, ZZM-SA, Exhaust Port & Silencer Location: Left Side, Supply Port: Left Side

Stations: 1 Station, Port Thread: Rc, Exhaust Port: S (Silencer for ZZM, ZZM-SA), Exhaust Port & Silencer Location: L (Left Side), Supply Port: L (Left Side)

Mechanically Jointed Rodless Cylinders

3 @4 r o !1 !

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

PL BG 2 x 4 x RT Cushion valve PL WA WB Width across flats SW Width across flats SW KK B D D B R E KK WB WA VD L12 VD L9 2 x 4 x RT L2 BG E R L12 ZY + 2 x Stroke L8 + Stroke H H + Stroke A G G WH A L2 BG WH + Stroke With rod boot at one end e d f l h h + L8 + H + 2 x Stroke Stroke range*1 [mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VD WA WB WH ZY Bore size [mm] 32 Up to 1000

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

PL 2 x EE port PL BG 2 x 4 x RT PL Width across flats SW Width across flats SW Cushion valve WB WA WA WB KK D KK B D B R E 2 x 4 x RT VD L9 E R VD L12 L2 BG G WH A H G L12 L2 BG H + Stroke A WH + Stroke ZY + 2 x Stroke L8 + Stroke With rod boot at one end e d l h + L8 + H + 2 x Stroke h f Bore size [mm] Stroke range [mm] A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY E R L2 L9 H SL

SL5200

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

Series AP3500

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

SQ1000/2000

O-ring R R R P R P SUP passage shut off SUP/EXH passages shut off EXH block plate Approx. 10 P R SSQ2000-B-R 9.2 5.2 When the exhaust from a valve interferes with other stations in the circuit, this is used between stations to separate exhausts. Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves.

SMC Basic Pneumatics

U.S. gallon 9 r gram kg kilogl8m oz. ouhoo h-pdd Table 3.3b Conversion of Units P N E u r i t a r t c T E c H N o L o c Y P R E S S U R E ll should b noted that the Sl unit of pressure is th pascal (Pa) I Pa = I N/m2 (Newton per square merer) This unil is extremely small and so, to avoid huge numbers in practice, an agreement has been made to use lhe bar as a unit ot 100,000 Pa. 100,000

%silltr

U.S. gallon 9 r gram kg kilogl8m oz. ouhoo h-pdd Table 3.3b Conversion of Units P N E u r i t a r t c T E c H N o L o c Y P R E S S U R E ll should b noted that the Sl unit of pressure is th pascal (Pa) I Pa = I N/m2 (Newton per square merer) This unil is extremely small and so, to avoid huge numbers in practice, an agreement has been made to use lhe bar as a unit ot 100,000 Pa. 100,000 Pa

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

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Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.