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If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

53 45 110.5 133.5 SIZE 2 SIZE 3 n= NUMBER OF STATIONS (MIN.2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 71n + 66 L2= 71n + 90 L1= 56n + 90 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 3 SIZE 2 SIZE 1 n L n 10 n L 3 2 4 5 6 8 7 9 10 5 6 7 8 9 10 2 3 4 6 5 7 8 9 2 3 4 L 279 421 492 634 563 705 776 370 482 426 538 594 650 L1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

1000 [mm] 5000 [mm] Connector specification Straight Angle S A 010 050 Straight connector type Angle connector type M12 14.9 M12 6 6 5 1 2 1 2 28.3 5 4 3 4 3 48 34 18 30 5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15

For L dimension, refer to the dimensions of each kit. 25 35 5.5 L Dimension L = 12.5 x n + 10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

L dimension 1.5 m 3 m 5 m Part no. L dimension 1.5 m 3 m 5 m AXT100-MC26-015 AXT100-DS25-015 AXT100-MC26-030 AXT100-DS25-030 AXT100-MC26-050 AXT100-DS25-050 When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C-24308. L L (60) 44 Approx. 10 8 16 14 25 1 13 47.04 55 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Terminal no.

GA R 2-RcP CDH9 J H MM D E e Width across flats G l 10 f 0.1 0.4 CX NB Air release Air release SS + Q + l + Stroke C NA T B U ZZ + Q + l + Stroke S + Stroke K F L MA A RR SS + Stroke ZZ + Stroke (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB NA NB P R S T CX CD RR SS U L e f Q 32 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 52 21.5 15 25 to 1400 1/

J H MM D E e 10 f l CX 0.1 0.4 NB Air release Air release C NA T B SS + Q + l + Stroke U ZZ + Q + l + Stroke S + Stroke K F L MA Width across flats G A RR SS + Stroke ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) e CX J B C F GA GB NA NB P R S T CD RR SS U L l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209

end plate assembly Manifold block assembly U side end plate assembly < End plate assembly > AXT512 A AXT512 1A End plate position Cylinder port position Wiring specification L side R side L R L side R side L R Side Bottom A B P, R port size Rc1/2 Rc3/4 12 One-touch fitting 04 06 C12 Cylinder port size Rc3/8 Rc1/2 03 04 < Manifold block replacement parts> Part No

1000 [mm] 5000 [mm] Connector specification Straight Angle S A 010 050 Straight connector type Angle connector type M12 14.9 M12 6 6 5 1 2 1 2 28.3 5 4 3 4 3 48 34 18 30 5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS Large capacity EVS7-6 (Size 1) 1200 l/min (ANR) EVS7-8 (Size 2) 3000 l/min (ANR) EVS7-10 (Size 3) 5500 l/min (ANR) VFN Cylinder driving size Flow rate 100 160 200 Rubber seal, single type Lightweight Size 1 (3 position): 0.55 kg Size

Stations: 2 Stations, Port Thread: Rc, Exhaust Port: 1/2, Exhaust Port & Silencer Location: Both Sides, Supply Port: -

Stations: 2 Stations, Port Thread: Rc, Exhaust Port: 04 (1/2), Exhaust Port & Silencer Location: B (Both Sides)