Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

ARJ310

IN OUT 01 ARJ 3 10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

VEX-OMY0001

No.VEX-OMY0001 1) 2) 3) 1.351.45Nm P8,9 02 03 04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

Digital Flow Switch Series PFA For Air Series PFW For Water

Symbol 100 200 500 50 10 Rc NPT G 01 02 03 04 1/8 1/4 3/8 1/2 PFA510, 550 PFA511, 521 PFA551 Specifications PFA511 PFA521 PFA551 PFA510 PFA550 Model Measured fluid Dry air, N2 Detection type Heater type 20 to 200l/min 50 to 500l/min 10 to 100l/min 1 to 10l/min 5 to 50l/min Flow rate measurement range Operating pressure range 0 to 0.5MPa Withstand pressure 1.0MPa 3kPa (at 50l/min) 3kPa

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 B 56.6 P 1 1 P 30.5 29.1 A 4 A 4 A 4 A 4 A 4 8.7 11.1 12.5 22.7 18 (Pitch) P=16 (10) (14.3) (For DIN rail mounting) (23.3) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

Table of Contents

(Except 50 and 63) M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 b C H B Applicable bore size (mm) 6, 10 d M10 x 1.0 H 4 B 14 C 16.2 Part no. SNJ-016B 8-15-31 31 Magnetically Coupled Rodless Cylinder Direct Mount Type Series CY1R 6, 10, 50, 63 How to Order CY1R 25 H 300 Y7BW Number of auto switches Direct mount type Nil 2 pcs. S 1 pc. n n pcs.

For Water Digital Flow Switch Series PFW

View A PFW31(-M) PFW3-B DIN rail type 8-M3 3 x 7.2 (= 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 26

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

CRB2/CRBU2/CRB1

Double vane type CDRB2BW40-S, D Keyway dimensions h (h9) L b (h9) Model CDRB2BW400 0.030 20 4 0 0.030 4 CRB1 Free-Mounting Type CRBU2 CRB2 15 Vane Type Rotary Actuator with Angle Adjuster Series CRB2BWU Sizes: 10, 15, 20, 30, 40 How to Order CRB2 10 WU B 180 S Standard Size 10 15 20 30 40 Size 10 15 With auto switch Sizes: 10, 15 90 L CDRB2 10 WU F 180 S CDRB2 20 WU B 180 S R73 L With auto

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12

0.4

One-touch fitting C10 [3(R) EXH port] (C12 in case of branch type) C10: 10 One-touch fitting (C12: 12 One-touch fitting) R R DIN rail clamp screw 76.5 60 35 25 10 3 3 X X 49.5 12 B B B B B B B B P12 P 30 1 1 A A A A A A A A 13.5 C10 [1(P) SUP port] C10: 10 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] 25 C10: 10 One-touch fitting (C12: 12

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.