C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

Solid State Auto Switches

(Red Green Red) D-M5NW D-M5PW D-M5BW Auto switch model Wiring type 3-wire 2-wire Output type PNP NPN Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 1.5 V or less (0.8 V or less at 10 mA load current) 5 to 40 mA 80

Support Guide/11-LEFG Series

20 30 40 50 0 0 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

XL

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

CXS

Stroke range Standard strokes (mm) Bore sizes (mm) Long strokes (mm) Series 10 80, 90, 100, 110, 120, 125, 150 10 to 75 CXSM CXSL 15 110, 120, 125, 150 20, 25, 32 10 to 100 110, 120, 125, 150, 175, 200 10,15 10, 20, 30, 40, 50 75, 100, 125, 150 CXSWM CXSWL 10, 20, 30, 40, 20, 25, 32 125, 150, 175, 200 50, 75, 100 Dimensions CXS10, 15 CXS20, 25, 32 Stroke ZZ Stroke ZZ SS SS Z Z (Z) (Z) CXS10

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Rod end thread Nil F Male rod end Female rod end Model Cushion Auto switch mounting Bore size (mm) Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CG1RN20 10-CG1RN25 20 25 25, 50, 75, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 Relief type Vacuum suction type 1/8 10-CG1RN32 10-CG1RN40 32 40 25, 50, 75, 100, 125, 150, 200, 250, 300 10-CG1RN50 10-CG1RN63 11-CG1RN20 11

Electric Slide Table / High Precision Type 《 AC servo motor 》

1.5 5 5 100 to 120 200 to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

VQ7-6/7-8

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 24 VDC 12 VDC Other Nil SB None With 10 10 stations VF Note) When equipped with control unit, 1 or 2 stations are used for mounting.

HRX-OM-W060

P.5-10 It indicates the set temperature. (10) Circulating fluid set temperature P.5-10 CH2 Press the numeric section to change the set temperature. (11) Circulating fluid discharge pressure It indicates the discharge pressure.

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 ** Non-Standard Product, consult factory for lead time.

MXQ

MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-10 0.02 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25-30 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-50 MXQ25-50 MXQ25-75 MXQ25-75 0.12

VZ100/300/500

) (P , R port) 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) Stations n L1 L2 18 304 296 19 320 312 20 336 328 17 288 280 14 241 232 15 256 248 16 272 264 13 224 216 10 176 168 11 192 184 12 208 200 9 160 152 6 112 104 7 128 120 8 144 136 5 96 88 2 48 40 3 64 56 4 80 72 L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQP2 Double acting 7-6-88 Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 Spring extend CQP2 7-6-98 Large Bore Size 125, 140 160, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S

Table of Contents

ms VQ1000 10 ms 200 million cycles VQ2000 20 ms Dispersion accuracy 2 ms Innovative mounting methods A valve can be changed without entirely disassembling the manifold.

MNB

1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 32 50 40 Load weight: m(kg) Load weight: m(kg) 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500