Pin Clamp Cylinders

(Cylinder stroke) 0 0.05 d 10 (Clamp stroke) Q Q SR Port side K B 120 C Mounting surface 8 to 10 26 12 48 67 10.5 (9) Port side C Mounting surface 14.5 15.5 30 Diamond cut shape (Guide pin dia.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

High Power Cylinder Series RHC

(10) AS4001F (16) AS320 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS420 (74) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000

Industrial Filters

13 18 10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

0 -0.074 0 -0.087 40 45 66 R0.5 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 10 20 M14 x 1.5 30 1/4 37 114 11 17 15 50 50 73 R0.5 M10 x 1.5 25 9 73 53 20 28 17 17 20 10 22 M16 x 1.5 30 3/8 43 116 11 19 15 63 55 80 R0.5 M10 x 1.5 28 8 80 60 22.4 30 17 17 22 10 25 M18 x 1.5 30 3/8 47 120 11 21 15 80 65 90 R2.5 M12 x 1.75 32 8 100 75 28 32 22 20 26 13 29 M22 x 1.5 35 1/2 57 132 11 26 25 100 80 100

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61 67 81 100 120 142 172 26

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H/ 702H-L 18 to 30 VDC 10% 18 to 30 VDC PF2M7-L PFMC-L 10% 21.6 to 30 VDC PF3A8 H-L Temperature characteristics (25C standard) 3% F.S. 1 digit (15 to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor unit Monitor unit Monitor unit (15 to 35C) 3% F.S. (15 to 35C) 5% F.S. (0 to 50C

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Individual EXH Spacer Assembly Individual SUP Spacer Assembly SYJ5000-17-1A SYJ5000162 A Round head combination screw M2.5 x 36, Matt nickel plated (with spring washer) Round head combination screw M2.5 x 40, Matt nickel plated (with spring washer) Thread type Nil F N T Rc G NPT NPTF B A B A Manifold Gasket DXT192-10-15 Manifold Gasket DXT192-10-16 P Individual EXH spacer SYJ5000-17-1 Individual

CLS

97.5 96 97.5 144 154 10 8 15 13 3.5 1.5 5.5 200 200 10 107.0 108.0 107.5 108.0 154 164 12.5 10.5 17.5 15.5 6 4 8 D-Y7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Operating Range Auto switch model Bore size (mm) 125 140 160 180 200 D-Z7/Z80 14.5 14 13 14 14.5 Hs D-A3/A44 D-A5/A6 A 10 10 10 10 10 D-A59W Ht 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

6 Special resin MYA63-15-R6659 MYA40-15-R6658 MYA25-15-R6657 MYA16-15-R6656 Scraper !

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

JXCx-OMT0061CN

. 15.1 [5m ] (1) (2 ) --A B-1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B

JXCx-OMT0005CN

15.1 [5m ] LE CP (1) 2 A B-1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) 2 (2) 1 8 1 B1 A1 (14) 17.7 5 6 (3) 1 2 (18) A6 B6 15 16 (11) 30.7 L 15.2 [820m] 1 2 LE CP 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13

CP95

20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12

CP95

16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

Compact Cylinder with Air Cushion Series RQ

B + Stroke L K A + Stroke 2 x 4-M6 x 1.0 effective depth 10 M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5