Air Cylinder

Auto switch capable Standard Stroke List (in) Bore Size Standard Stroke 1.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 2, 2.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28, 30 Example: NCDA1B150-0200R+0300H-XC11 will stroke 2 then an additional 3 for a total stroke of 5.

Table of Contents

Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Electric Actuators

to 150 3.14 to 4.5 2.2 4 6 20 to 300 1.6 to 2.2 1.7 8 Miniature rod type LEPY 25, 50 75 Page 5 4.4 10 to 200 5.6 to 11.2 5.4 to 9.0 5 10 Series LECP6 Series LECP1 LEPY 3.3 20 to 350 2.8 to 5.6 2.7 to 4.5 10 10 to 150 3.14 to 4.5 2.2 4 6 Miniature slide table type LEPS 20 to 300 1.6 to 2.2 1.7 8 Page 15 25, 50 4.4 10 to 200 5.6 to 11.2 5.4 to 9.0 5 10 3.3 20 to 350 2.8 to 5.6 2.7 to 4.5

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

HRX-OM-Q026

25 Cooling capacity [kW] 20 Facility water temperature: 40 oC 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-14: Cooling Capacity (HRSH200-W-20/40-) 8.4.9 HRSH250-W-20/4035 Facility water temperature: 32 oC 30 25 Cooling capacity [kW] Facility water temperature: 40 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-15: Cooling Capacity (

Dual Speed Controller with One-touch Fitting Series ASD

12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(Pitch) P = 10 12.8 34.3 23.6 32.1 15.4 15.6 3/5 3/5 3/5 2 2 2 2 2 2 2 30.6 46.2 54.5 1 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting (PE: Pilot EXH port) Applicable tubing O.D: 4, 5/32" 20.5 6.2 One-touch fitting

C95

200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

Vacuum Unit

Number of Manifold Stations that Can Operate Simultaneously10 Item Model (Nozzle size) ZK2m07 ZK2m10 ZK2m12 ZK2m15 Complex exhaust Supply from one side 8 5 4 3 Air pressure supply (PV) port 8, 5/16" Supply from both sides 10 7 5 5 Individual port exhaust, High-noise reduction silencer exhaust Supply from one side 8 6 6 3 Supply from both sides 10 9 9 6 10 As long as the number of stations

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

A_HEC-OM-K001

9 Appendix 9.5.4 Recirculating fluid Pressure Loss Fluid: Water HED003 35 30 Pressure loss kPa 25 HED003-HW13 20 15 10 HED003-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-13 Recirculating fluid Pressure loss (HED003) HED005, HED007 35 30 Pressure loss kPa 25 HED005-HW13 HED007-HW13 20 15 10 HED005-HW19 HED007-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-14 Recirculating

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

Compressed Air Cleaning Filter Series

0 10-3 Kit includes parts from to 10-5 10-1 Repair kit for main valve 10 ADH-D400 10-4 11 Material: NBR G85(B) O-ring Note) When changing parts, follow the operating manual. Do not disassemble other parts. 10-5 OUT Specific Product Precautions Be sure to read this before handling.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Q1 = M Y L2 max Q2 L2(3 x P) Size C1 = C (mm) D5.5 to 8 10 3 Y 1 Q1 L1 max X Size 10 5.5 to 14 X 1 3 7.5 to 9 15 3, 4 Y 1.5 Y = L2 = C2 = C L1(3 x P) 15 7.5 to 18 X 1.5 3, 4 9.5 to 10 20 3, 4, 5 Y 1.5 X = L1 = 20 9 to 20 X 1.5 3, 4, 5 11 to 13 30 3, 4, 5, 6 Y 2 Q2 = M 30 11 to 22 X 2 3, 4, 5, 6 14 to 15 40 3, 4, 5, 6, 8 Y 4.5 105 Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom

10

8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16

Pin Cylinders Series CJP2/CJP

5 10 15 4 6 10 15 10 12 19 27 11.5 13.9 22 31 Variation Action Mounting Note 2) Bore size (mm) Mounting Series Bore size (mm) Standard stroke (mm) 5, 10, 15 (20) Note 1) Series Action Standard stroke (mm) 5, 10, 15 5, 10, 15 5, 10, 15 5, 10, 15 4 6 10 16 4 6 10 15 Basic Flange Foot Clevis Trunnion Panel mount type, Embedded type Single acting, Spring return Double acting, Single rod 5, 10