OMR0032

80 mm/s2 Target position 2: Travel distance 5 mm, Travel speed 20 mm/s, Acceleration 80 mm/s2, Deceleration 80 mm/s2 ii.Calculation example Travel distance [Number of pulses (pulse)] = Travel distance (mm) Encoder resolution (m/pulse) Travel speed [Pulse frequency (pulse/s)] = Travel speed (mm/s) Encoder resolution (m/pulse) Acceleration and Deceleration time [s] =Travel speed (mm/s) /

High Vacuum L Type Valve

XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-11 pc. (Blanking plate) VV3Z4-50-061-01 (6 stations) VZ415-1G3 pcs. VZ425-1G2 pcs. VVZ400-32A-21 pc.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

MRQ

(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Tamper Proof and Flat Head Screw

(Part no.: AS-T-1) 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D. 1/4 standard Metric sizes 23 04 06 08 10 12 Inch sizes 3/8 standard 3.2 01 03 05 07 09 11 13 1/8 1/2 standard 4 5/32 6 3/16 With One-touch fitting 8 1/4 10 5/16 12 3/8 1/2 Use 1/8 tubing.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

CYV

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Series: LEFG (Guide), Size: 40, Mounting Pitch: S [Ball Screw Drive, Step Motor/Servo Motor (24 VDC)/AC Servo Motor], Stroke, mm: 400

Series: Guide, Size: 40, Mounting Pitch: S [Ball Screw Drive, Step Motor/Servo Motor (24 VDC)/AC Servo Motor], Stroke, mm: 400

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Description Material 1 Bracket Steel strip 2 Cross recessed round head screw Steel wire 3 Clasp Steel strip 8 Cassette 9 Seal NBR 10 O-ring NBR 11 O-ring NBR 12 Bonnet A POM 13 Bonnet B POM 14 Gear PPS 15 Indicator gear POM 16 Clip Stainless steel 1 The AS3002FS-11, AS4002FS-11, AS4002FS-13 are made of stainless steel. 9 Related Equipment Holder for Speed Controller TMH Series Specifications

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

3.5 7 RB0805 RB1006 RB1411 RB2015 Shock absorber model 5.5 11 0.98 3.92 14.7 58.8 Maximum energy absorption: (J) 5 10 Stroke absorption: (mm) 5 6 11 15 5.5 11 Collision speed: (m/s) 0.05 to 5 4.5 9 Max. operating frequency: (cycle/min) 80 70 45 25 Since the cylinder is in an intermediate stop condition when stroke adjustment is performed, use caution regarding the operating pressure and

Low Profile Guide Type

mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1547 CY1F Series Precautions at Vertical Operation and Intermediate Stop Vertical Actuation 1.

RSH

Option (1) D C S Without option With locking mechanism With cancel cap With lever detection switch Action (2) D B T Double acting (1) The options can be combined, provided that the priority order is indicated as D, C, S.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.