Rubber seal 5 Port Solenoid Valve Series SYJ5000

terminal (D): SYJ5220-D-M5 M8 connector (W0): SYJ5220-W0-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

Air Cylinder NCM Series Stainless Steel Cylinders

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

Modular F.R.L. Unit

115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table Series MXP Table Accuracy Clean Series: Precision Air Slide Table Traveling parallelism C 11-MXP Cylinder bore Stroke Adjuster option D Surface C to surface A M Clean series Vacuum type B Surface D to surface B W 11-MXPJ6Stroke A Port C Clean series Vacuum type This type has a relief port provided

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 11 11 Vacuum suction port M5 x 0.8 N x M5 x 0.8 thread depth 6 Note 1) Note 2) Extension end adjuster 36.5 (Extension end adjuster) 5.5 11 5H9 ( ) depth 5 +0.030 0 Retraction end adjuster 6 12.5 (Extension end adjuster) 24.5 28 58 1 24 3.5 49 29 24.5 14.5 5H9 ( ) depth 5 +0.030 0 F 6.5 4 x M5 x 0.8 thread depth 7 2 N 1 x F 14 41 3 x M6 x 1 thread

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

2/3 Port Valve

15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 43 29 43 29 28 19 28 19 18 11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 20 Not included for Option Z (Removed parts) 21 Not included for Options Z and Z1 (Removed parts) 11 1 No condensation should be present.

XM, XY

x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

1

Refer to pages 11 to 13 for cylinders with auto switches.

PF-OMM0004_C

77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -82No.PF-OMM0004-D PF3W704/720/740

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi

Compact Guide Cylinder

Refer to pages 10 and 11 for cylinders with auto switches.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L2 = 16n + 22 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 43 54 75 85.5 59 70 100 110.5 75 86 112.5 123 91 102 125 135.5 107 118 137.5 148 123 134 162.5 173 139 150 175 185.5 155 166 187.5 198 171 182 212.5 223 187 198 225 235.5 203 214 237.5 248 219 230 250 260.5 235 246 275 285.5 251 262 287.5 298 267 278 300 310.5 283 294 325 335.5

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

MK

21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15